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TitleOn-chip array of thermoelectric peltier microcoolers
Author(s)Gonçalves, L. M.
Rocha, J. G.
Couto, C.
Alpuim, P.
Correia, J. H.
KeywordsTelluride peltier
telluride peltier microcooler array
Issue date2007
CitationINTERNATIONAL CONFERENCE ON SOLID STATE SENSORS, ACTUACTORS AND MICROSYSTEMS,14, Lyon, 2007 – “International Conference on Solid-State Sensors, Actuators and Microsystems”. [S.l. : s.n., 2007].
Abstract(s)This article reports on the theoretical modelling, the Finite Element Modelling (FEM) simulation, the fabrication process and preliminary results of the first on-chip thermoelectric microcooler array (64 pixels arranged in a 88 array), with each pixel independently controlled. This microcooler array uses co-evaporated V–VI compounds of Bi2Te3 and Sb2Te3 as thermoelectric layers, and can be fabricated using planar thin-film technology, lithography and wet etching on top of a silicon wafer, where the CMOS electronic circuits were previously made
TypeConference paper
AccessOpen access
Appears in Collections:DEI - Artigos em atas de congressos internacionais

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