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TitleNeural electrode array based on aluminum: fabrication and characterization
Author(s)Peixoto, Alexandre Coumiotis Moreira
Gonçalves, Sandra Beatriz Tomé
Ferreira da Silva, Alexandre
Dias, Nuno Sérgio Mendes
Correia, J. H.
KeywordsInvasive electrode
Iridium oxide
Electrode array
Sharp tips
Issue date2013
JournalIEEE Sensors Journal
Abstract(s)A unique neural electrode design is proposed with 3 mm long shafts made from an aluminum-based substrate. The electrode is composed by 100 individualized shafts in a 10 × 10 matrix, in which each aluminum shafts are precisely machined via dicing-saw cutting programs. The result is a bulk structure of aluminum with 65 ° angle sharp tips. Each electrode tip is covered by an iridium oxide thin film layer (ionic transducer) via pulsed sputtering, that provides a stable and a reversible behavior for recording/stimulation purposes, a 40 mC/cm 2 charge capacity and a 145 Ω impedance in a wide frequency range of interest (10 Hz-100 kHz). Because of the non-biocompatibility issue that characterizes aluminum, an anodization process is performed that forms an aluminum oxide layer around the aluminum substrate. The result is a passivation layer fully biocompatible that furthermore, enhances the mechanical properties by increasing the robustness of the electrode. For a successful electrode insertion, a 1.1 N load is required. The resultant electrode is a feasible alternative to silicon-based electrode solutions, avoiding the complexity of its fabrication methods and limitations, and increasing the electrode performance.
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Appears in Collections:ICVS - Artigos em Revistas Internacionais com Referee

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