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TitleLow f-number microlenses for integration on optical microsystems
Author(s)Rocha, Rui Pedro
Belsley, M.
Correia, J. H.
Carmo, João Paulo Pereira
Optical device fabrication
Focal length characterization
Issue date2015
JournalIEEE Sensors Journal
CitationRocha, R. P., Belsley, M. S., Correia, J. H., & Carmo, J. P. (2015). Low f-Number Microlenses for Integration on Optical Microsystems. IEEE Sensors Journal, 15(7), 4073-4075. doi: 10.1109/jsen.2014.2385476
Abstract(s)This paper presents microlenses (MLs) with low f-number made of AZ4562 photoresist for integration on optical microsystems. The fabrication process was based on the thermal reflow and rehydration. Large series of MLs were fabricated with a width of 35 μm, a thickness of 5 μm, and spaced apart by 3 μm. The MLs were fabricated directly on the surface of a die with type n+/p-substrate junction photodiode fabricated in a standard CMOS process. The measured focal length was 49 μm with a tolerance of ±2 μm (maximum error of ±4%), resulting in a numerical aperture of 33.6 × 10-2 (±1.3 × 10-2). The measurements also revealed an f-number of 1.4.
AccessOpen access
Appears in Collections:CDF - FAMO - Artigos/Papers (with refereeing)

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