Please use this identifier to cite or link to this item: http://hdl.handle.net/1822/39802

TitleLow f-number microlenses for integration on optical microsystems
Author(s)Rocha, Rui Pedro
Belsley, M.
Correia, J. H.
Carmo, João Paulo Pereira
KeywordsOPTO
Micro-optics
Microlenses
Optical device fabrication
F-number
Focal length characterization
Issue date2015
PublisherIEEE
JournalIEEE Sensors Journal
CitationRocha, R. P., Belsley, M. S., Correia, J. H., & Carmo, J. P. (2015). Low f-Number Microlenses for Integration on Optical Microsystems. IEEE Sensors Journal, 15(7), 4073-4075. doi: 10.1109/jsen.2014.2385476
Abstract(s)This paper presents microlenses (MLs) with low f-number made of AZ4562 photoresist for integration on optical microsystems. The fabrication process was based on the thermal reflow and rehydration. Large series of MLs were fabricated with a width of 35 μm, a thickness of 5 μm, and spaced apart by 3 μm. The MLs were fabricated directly on the surface of a die with type n+/p-substrate junction photodiode fabricated in a standard CMOS process. The measured focal length was 49 μm with a tolerance of ±2 μm (maximum error of ±4%), resulting in a numerical aperture of 33.6 × 10-2 (±1.3 × 10-2). The measurements also revealed an f-number of 1.4.
TypeArticle
URIhttp://hdl.handle.net/1822/39802
DOI10.1109/JSEN.2014.2385476
ISSN1530-437X
Peer-Reviewedyes
AccessOpen access
Appears in Collections:CDF - FAMO - Artigos/Papers (with refereeing)

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