Utilize este identificador para referenciar este registo:
https://hdl.handle.net/1822/39802| Título: | Low f-number microlenses for integration on optical microsystems |
| Autor(es): | Rocha, Rui Pedro Belsley, M. Correia, J. H. Carmo, João Paulo Pereira |
| Palavras-chave: | OPTO Micro-optics Microlenses Optical device fabrication F-number Focal length characterization |
| Data: | 2015 |
| Editora: | IEEE |
| Revista: | IEEE Sensors Journal |
| Citação: | Rocha, R. P., Belsley, M. S., Correia, J. H., & Carmo, J. P. (2015). Low f-Number Microlenses for Integration on Optical Microsystems. IEEE Sensors Journal, 15(7), 4073-4075. doi: 10.1109/jsen.2014.2385476 |
| Resumo(s): | This paper presents microlenses (MLs) with low f-number made of AZ4562 photoresist for integration on optical microsystems. The fabrication process was based on the thermal reflow and rehydration. Large series of MLs were fabricated with a width of 35 μm, a thickness of 5 μm, and spaced apart by 3 μm. The MLs were fabricated directly on the surface of a die with type n+/p-substrate junction photodiode fabricated in a standard CMOS process. The measured focal length was 49 μm with a tolerance of ±2 μm (maximum error of ±4%), resulting in a numerical aperture of 33.6 × 10-2 (±1.3 × 10-2). The measurements also revealed an f-number of 1.4. |
| Tipo: | Artigo |
| URI: | https://hdl.handle.net/1822/39802 |
| DOI: | 10.1109/JSEN.2014.2385476 |
| ISSN: | 1530-437X |
| Arbitragem científica: | yes |
| Acesso: | Acesso aberto |
| Aparece nas coleções: | CDF - FAMO - Artigos/Papers (with refereeing) |
Ficheiros deste registo:
| Ficheiro | Descrição | Tamanho | Formato | |
|---|---|---|---|---|
| IEEE_microlens.pdf | 1,12 MB | Adobe PDF | Ver/Abrir |
