Utilize este identificador para referenciar este registo:
https://hdl.handle.net/1822/21377
Título: | Pull-in MEMS Inclinometer |
Autor(es): | Alves, F. S. Dias, Rosana A. Cabral, Jorge Rocha, Luís A. |
Palavras-chave: | Inclinometer MEMS Pull-in voltage |
Data: | Out-2012 |
Editora: | Elsevier |
Revista: | Procedia Engineering |
Resumo(s): | A novel MEMS inclinometer is presented in this paper. The sensor uses the pull-in voltages of microfabricated structures as the transduction mechanism enabling a high-resolution, auto-calibrated inclinometer. Pull-in is characterized by the sudden loss of stability in electrostatically actuated parallel-plate actuators and since pull-in voltage is stable and easy to measure, it enables an interesting transduction mechanism. The microstructures have differential actuation electrodes (with a common electrode) resulting in two pull-in voltages that change differentially with applied acceleration. The sensor resolution is defined by the resolution of the measured pull-in, i.e., resolution of the actuation voltage. Experimental results show a sensitivity of 50 mV/º with the resolution of the actuation voltage set below 1 μV using a 24 bits Digital-to-Analog Converter (DAC). |
Tipo: | Artigo em ata de conferência |
URI: | https://hdl.handle.net/1822/21377 |
DOI: | 10.1016/j.proeng.2012.09.377 |
ISSN: | 1877-7058 |
Versão da editora: | www.elsevier.com |
Arbitragem científica: | yes |
Acesso: | Acesso restrito UMinho |
Aparece nas coleções: | IPC - Artigos em revistas científicas internacionais com arbitragem |
Ficheiros deste registo:
Ficheiro | Descrição | Tamanho | Formato | |
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AlvesEurosensors.pdf Acesso restrito! | 535,59 kB | Adobe PDF | Ver/Abrir |