Utilize este identificador para referenciar este registo:
https://hdl.handle.net/1822/21377
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Campo DC | Valor | Idioma |
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dc.contributor.author | Alves, F. S. | - |
dc.contributor.author | Dias, Rosana A. | - |
dc.contributor.author | Cabral, Jorge | - |
dc.contributor.author | Rocha, Luís A. | - |
dc.date.accessioned | 2012-12-10T16:42:40Z | - |
dc.date.available | 2012-12-10T16:42:40Z | - |
dc.date.issued | 2012-10 | - |
dc.identifier.issn | 1877-7058 | por |
dc.identifier.uri | https://hdl.handle.net/1822/21377 | - |
dc.description.abstract | A novel MEMS inclinometer is presented in this paper. The sensor uses the pull-in voltages of microfabricated structures as the transduction mechanism enabling a high-resolution, auto-calibrated inclinometer. Pull-in is characterized by the sudden loss of stability in electrostatically actuated parallel-plate actuators and since pull-in voltage is stable and easy to measure, it enables an interesting transduction mechanism. The microstructures have differential actuation electrodes (with a common electrode) resulting in two pull-in voltages that change differentially with applied acceleration. The sensor resolution is defined by the resolution of the measured pull-in, i.e., resolution of the actuation voltage. Experimental results show a sensitivity of 50 mV/º with the resolution of the actuation voltage set below 1 μV using a 24 bits Digital-to-Analog Converter (DAC). | por |
dc.description.sponsorship | Fundação para a Ciência e a Tecnologia (FCT) | por |
dc.language.iso | eng | por |
dc.publisher | Elsevier 1 | por |
dc.rights | restrictedAccess | por |
dc.subject | Inclinometer | por |
dc.subject | MEMS | por |
dc.subject | Pull-in voltage | por |
dc.title | Pull-in MEMS Inclinometer | por |
dc.type | conferencePaper | - |
dc.peerreviewed | yes | por |
dc.relation.publisherversion | www.elsevier.com | por |
sdum.publicationstatus | published | por |
oaire.citationStartPage | 1239 | por |
oaire.citationEndPage | 1242 | por |
oaire.citationTitle | Procedia Engineering | por |
oaire.citationVolume | 47 | por |
dc.identifier.doi | 10.1016/j.proeng.2012.09.377 | por |
dc.subject.wos | Science & Technology | por |
sdum.journal | Procedia Engineering | por |
sdum.conferencePublication | 26TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS, EUROSENSOR 2012 | por |
Aparece nas coleções: | IPC - Artigos em revistas científicas internacionais com arbitragem |
Ficheiros deste registo:
Ficheiro | Descrição | Tamanho | Formato | |
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AlvesEurosensors.pdf Acesso restrito! | 535,59 kB | Adobe PDF | Ver/Abrir |