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|Title:||Capacitively coupled rf coupled plasmas in N2-H2 mixtures|
Pintassilgo, C. D.
Ramos, Marta M. D.
Alves, L. L.
|Publisher:||European Physical Society|
|Abstract(s):||This paper studies the modifications induced in low-pressure radio-frequency (rf) capacitively coupled nitrogen plasmas, by the addition of a few amount of hydrogen (up to 5%). The work is an intermediate step towards the study of N2-CH4 plasmas, for the simulation of the ionospheric chemistry of Saturn's satellite Titan. The plasmas are studied using both experiments and simulations. The experimental setup is a parallel-plate reactor (driven at 13.56 MHz frequency), surrounded by a cylindrical metallic grid to confine the discharge . Electrical diagnostics allow measuring: (i) the electron density, by using a resonant cavity method; (ii) the effective rf power coupled to the plasma, by using the subtractive method . Optical emission spectroscopy diagnostics are used to study the evolution, with the working conditions, of: (i) the First Negative System with the N2+ band; (ii) the atomic hydrogen Hβ line at 486.1 nm; (iii) the atomic argon line at 811.5 nm. Simulations use a hybrid code that couples a 2D (r, z) time-dependent fluid-type module, describing the transport of the charged particles, to a very complete 0D kinetic module, for the nitrogen-hydrogen mixture. Results reveal that the electron density increases with the amount of injected H2, at constant coupled power. References  G. Alcouffe et al, Plasma Sources Sci. Technol. 19, 015008 (2010)  L.L. Alves et al, Plasma Sources Sci. Technol. (submitted, 2012)|
|Appears in Collections:||CDF - FCT - Comunicações/Communications (with refereeing)|
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