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https://hdl.handle.net/1822/81350
Título: | Role of sublimation kinetics of ammonia borane in chemical vapor deposition of uniform, large-area hexagonal boron nitride |
Autor(es): | Sompalle, Balaji Liao, Chun-Da Wei, Bin Cerqueira, Maria de Fátima Nicoara, Nicoleta Wang, Zhongchang Sadewasser, Sascha Alpuim, P. |
Data: | 1-Jul-2021 |
Editora: | American Institute of Physics |
Revista: | Journal of Vacuum Science & Technology A |
Citação: | Sompalle, B., Liao, C.-D., Wei, B., Cerqueira, M. de F., Nicoara, N., Wang, Z., … Alpuim, P. (2021, July). Role of sublimation kinetics of ammonia borane in chemical vapor deposition of uniform, large-area hexagonal boron nitride. Journal of Vacuum Science & Technology A. American Vacuum Society. http://doi.org/10.1116/6.0000987 |
Resumo(s): | Hexagonal boron nitride (h-BN) is a critical 2D insulator used as a substrate, gate dielectric, or encapsulation layer for graphene and other 2D materials and their van der Waals heterostructures. It is also promising as an active layer in single-photon emitters and other photonic devices. With the chemical formula H3N-BH3, ammonia borane is the most attractive precursor for up-scalable growth of large-area h-BN, using chemical vapor deposition given its stoichiometric B:N ratio, high stability under ambient conditions, nontoxicity, and high solubility in common solvents. Here, the synthesis of large-area (100 × 150 mm2) crystalline hexagonal boron nitride layers by thermal activation and decomposition of the precursor ammonia borane is presented. We describe two different reaction pathways for h-BN synthesis, providing evidence for dissimilarities in the sublimation kinetics of ammonia borane and how these differences critically influence the growth of h-BN. This understanding helps us accelerate h-BN production, reuse precursors, and reduce machine runtime, paving the way for upscalability. Moreover, our work provides a consistent unified view explaining the diverse deposition conditions reported in the literature for h-BN grown by CVD using ammonia borane as a precursor. |
Tipo: | Artigo |
URI: | https://hdl.handle.net/1822/81350 |
DOI: | 10.1116/6.0000987 |
ISSN: | 0734-2101 |
Versão da editora: | https://avs.scitation.org/doi/10.1116/6.0000987 |
Arbitragem científica: | yes |
Acesso: | Acesso aberto |
Aparece nas coleções: | CDF - CEP - Artigos/Papers (with refereeing) |
Ficheiros deste registo:
Ficheiro | Descrição | Tamanho | Formato | |
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JVA21-AR-00001.pdf | Author’s peer reviewed accepted manuscript | 1,43 MB | Adobe PDF | Ver/Abrir |