Multilayer spin-coating deposition of poly(vinylidene fluoride) films for controlling thickness and piezoelectric response

Abstract

Poly(vinylidene fluoride), PVDF, films have been processed by spin-coating with controlled thickness by multilayer film deposition. Films with thickness ranging from 300 nm to 25 m, -phase content up to 80%, piezoelectric coefficient d33 up to ~−20 pC/N and an optical transmittance in the visible range higher than 70%, were obtained with a one to three layer deposition process. The influence of the annealing temperature in the different layers is discussed as well as the possibility of obtaining functionally graded electroactive polymers though controlling spin-coating deposition parameters and thermal annealing of the different layers.