Utilize este identificador para referenciar este registo:
https://hdl.handle.net/1822/14701
Título: | Squeeze-film damper design with air channels : experimental verification |
Autor(es): | Dias, R. A. Cretu, E. Wolffenbuttel, R. F. Rocha, Luís A. |
Palavras-chave: | Squeeze-film damping Air channels MEMS capacitive sensing |
Data: | 2011 |
Editora: | Elsevier 1 |
Revista: | Procedia Engineering |
Resumo(s): | The experimental evaluation of damping-improved parallel-plate geometries is reported in this paper. An improved damper geometry with air channels was developed to address contradictory design constraints: large sensing parallel-plate area is desirable for a significant readout capacitance as well as reduced damping coefficient. Damping coefficients were measured at different gaps in conventional parallel-plates MEMS and in parallel-plates with air channels. The inertial masses of the fabricated structures were pulled-in and released. From the return to rest position trajectory, the damping coefficients, at each point, were extracted. Results show a significant damping decrease in parallel-plates with air channels without visible reduction in the capacitance value. |
Tipo: | Artigo em ata de conferência |
URI: | https://hdl.handle.net/1822/14701 |
DOI: | 10.1016/j.proeng.2011.12.012 |
ISSN: | 1877-7058 |
Versão da editora: | http://www.elsevier.com |
Arbitragem científica: | yes |
Acesso: | Acesso restrito UMinho |
Aparece nas coleções: | IPC - Textos completos em actas de encontros científicos internacionais com arbitragem |
Ficheiros deste registo:
Ficheiro | Descrição | Tamanho | Formato | |
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Eurosensors2011_R.pdf Acesso restrito! | 489,18 kB | Adobe PDF | Ver/Abrir |