Utilize este identificador para referenciar este registo:
https://hdl.handle.net/1822/14701
Registo completo
Campo DC | Valor | Idioma |
---|---|---|
dc.contributor.author | Dias, R. A. | - |
dc.contributor.author | Cretu, E. | - |
dc.contributor.author | Wolffenbuttel, R. F. | - |
dc.contributor.author | Rocha, Luís A. | - |
dc.date.accessioned | 2011-11-30T14:36:18Z | - |
dc.date.available | 2011-11-30T14:36:18Z | - |
dc.date.issued | 2011 | - |
dc.date.submitted | 2011-06-17 | - |
dc.identifier.issn | 1877-7058 | por |
dc.identifier.uri | https://hdl.handle.net/1822/14701 | - |
dc.description.abstract | The experimental evaluation of damping-improved parallel-plate geometries is reported in this paper. An improved damper geometry with air channels was developed to address contradictory design constraints: large sensing parallel-plate area is desirable for a significant readout capacitance as well as reduced damping coefficient. Damping coefficients were measured at different gaps in conventional parallel-plates MEMS and in parallel-plates with air channels. The inertial masses of the fabricated structures were pulled-in and released. From the return to rest position trajectory, the damping coefficients, at each point, were extracted. Results show a significant damping decrease in parallel-plates with air channels without visible reduction in the capacitance value. | por |
dc.description.sponsorship | Fundação para a Ciência e a Tecnologia (FCT) | por |
dc.language.iso | eng | por |
dc.publisher | Elsevier 1 | por |
dc.rights | restrictedAccess | por |
dc.subject | Squeeze-film damping | por |
dc.subject | Air channels | por |
dc.subject | MEMS capacitive sensing | por |
dc.title | Squeeze-film damper design with air channels : experimental verification | por |
dc.type | conferencePaper | - |
dc.peerreviewed | yes | por |
dc.relation.publisherversion | http://www.elsevier.com | por |
oaire.citationStartPage | 47 | por |
oaire.citationEndPage | 50 | por |
oaire.citationTitle | Procedia Engineering | por |
oaire.citationVolume | 25 | por |
dc.identifier.doi | 10.1016/j.proeng.2011.12.012 | por |
dc.subject.wos | Science & Technology | por |
sdum.journal | Procedia Engineering | por |
sdum.conferencePublication | EUROSENSORS XXV | por |
Aparece nas coleções: | IPC - Textos completos em actas de encontros científicos internacionais com arbitragem |
Ficheiros deste registo:
Ficheiro | Descrição | Tamanho | Formato | |
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Eurosensors2011_R.pdf Acesso restrito! | 489,18 kB | Adobe PDF | Ver/Abrir |