Please use this identifier to cite or link to this item: http://hdl.handle.net/1822/8395

TitleOn-chip array of thermoelectric peltier microcoolers
Author(s)Gonçalves, L. M.
Rocha, J. G.
Couto, Carlos
Alpuim, P.
Correia, J. H.
KeywordsThermoelectric
Peltier
Energy harvesting.
Bi2Te3
microcooler
telluride
Bi Te 2 3
Issue dateJul-2008
PublisherElsevier
JournalSensors and Actuators A: Physical
Citation"Sensors and Actuators, A : Physical". ISSN 0924-4247. A145-146 (July 2008) 75-80.
Abstract(s)This article reports on the theoretical modelling, the Finite Element Modelling (FEM) simulation, the fabrication process and preliminary results of the first on-chip thermoelectric microcooler array (64 pixels arranged in a 8×8 array), with each pixel independently controlled. This microcooler array uses co-evaporated V–VI compounds of Bi2Te3 and Sb2Te3 as thermoelectric layers, and can be fabricated using planar thin-film technology, lithography and wet etching, on top of a silicon wafer where the CMOS electronic circuits were previously made.
TypeArticle
URIhttp://hdl.handle.net/1822/8395
DOI10.1016/j.sna.2007.10.062
ISSN0924-4247
Publisher versionwww.sciencedirect.com
Peer-Reviewedyes
AccessOpen access
Appears in Collections:DEI - Artigos em revistas internacionais

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