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TitleThermoelectric micro converters for cooling and energy scavenging systems
Author(s)Gonçalves, L. M.
Silva, A. F.
Alpuim, P.
Rocha, R. P.
Correia, J. H.
Couto, Carlos
Silva, H. R.
KeywordsEnergy scavenging
Issue date16-Sep-2007
PublisherUniversidade do Minho
CitationMICROMECHANICS EUROPE WORKSHOP, 18, Guimarães, Portugal, 2007 – “MME 2007 : proceedings of the 18th MicroMechanics Europe Workshop”. Guimarães : Universidade do Minho, 2007. ISBN 978-972-98603-3-1.
Abstract(s)This paper describes the fabrication process of thermoelectric microconverters, based on n-type bismuth telluride (Bi2Te3) and p-type antimony telluride (Sb2Te3) thin films. Materials are fabricated by thermal co-evaporation with thermoelectric properties comparable to those reported for the same materials in bulk form (used in conventional macro-scale Peltier modules). Absolute value of Seebeck coefficient in the range 150-250 μVK-1 and in-plane electrical resistivity of 7-15 μΩm were obtained. Influence of fabrication parameters on thermoelectric properties is reported. The films were then patterned by photolithography and wet-etching techniques, using HNO3/HCl based etchants. Influence of composition and concentration of etchants in the process is reported. A microcooler was fabricated and analysed by infrared thermal image
AccessOpen access
Appears in Collections:DEI - Artigos em atas de congressos internacionais

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