Please use this identifier to cite or link to this item: https://hdl.handle.net/1822/71703

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dc.contributor.authorMaciel, Marino Jesus Correiapor
dc.contributor.authorRocha, Rui Pedro Leitão Silvapor
dc.contributor.authorCarmo, João Paulo Pereirapor
dc.contributor.authorCorreia, J. H.por
dc.date.accessioned2021-04-14T12:35:56Z-
dc.date.issued2014-03-
dc.identifier.issn0263-2241-
dc.identifier.urihttps://hdl.handle.net/1822/71703-
dc.description.abstractThis paper presents the statistical analysis applied into the shape of microlenses (MLs) for validating the high-reproducibility feature of their fabrication process. The MLs were fabricated with the AZ4562 photoresist, using photolithography and thermal reflow processes. Two types of MLs arrays were produced for statistical analysis purposes: the first with a cross-sectional diameter of 24 μm and the second with a cross-sectional diameter of 30 μm, and both with 5 μm spacing between MLs. In the case of 24 μm diameter arrays, the measurements showed a mean difference in diameter of 2.78 μm with a standard deviation (SD) of 0.22 μm (e.g., 2.78 ± 0.22 μm of SD) before the reflow, and 2.34 ± 0.35 μm of SD after the reflow. For the same arrays, the mean difference in height obtained was, comparatively to the 5.06 μm expected, 0.76 ± 0.10 μm of SD before the reflow and 1.91 ± 0.15 μm of SD after the reflow, respectively. A mean difference in diameter of 2.64 ± 0.41 μm of SD before the reflow, and 1.87 ± 0.34 μm of SD after the reflow was obtained for 30 μm diameter MLs arrays. For these MLs, a mean difference in height of 0.71 ± 0.12 μm of SD before the reflow and 2.24 ± 0.24 μm of SD after the thermal reflow was obtained, in comparison to the 5.06 μm of height expected to obtain. These results validate the requirement for reproducibility and opens good perspectives for applying this fabrication process on high-volume production of MLs arrays.por
dc.description.sponsorshipThis work was fully supported by the Portuguese Foundation for Science and Technology under the project FCT/ PTDC/EEA-ELC/109936/2009.por
dc.language.isoengpor
dc.publisherElsevierpor
dc.relationFCT/PTDC/EEA-ELC/109936/2009por
dc.rightsrestrictedAccesspor
dc.subjectMeasurementpor
dc.subjectStatistic analysispor
dc.subjectReproducibility validationpor
dc.subjectMicrolenses fabricationpor
dc.titleMeasurement and statistical analysis toward reproducibility validation of AZ4562 cylindrical microlenses obtained by reflowpor
dc.typearticlepor
dc.peerreviewedyespor
dc.relation.publisherversionhttps://www.sciencedirect.com/science/article/pii/S026322411300609Xpor
oaire.citationStartPage60por
oaire.citationEndPage67por
oaire.citationIssue1por
oaire.citationVolume49por
dc.date.updated2021-04-09T15:48:12Z-
dc.identifier.doi10.1016/j.measurement.2013.11.056por
dc.date.embargo10000-01-01-
dc.subject.wosScience & Technology-
sdum.export.identifier10455-
sdum.journalMeasurement: Journal of the International Measurement Confederationpor
Appears in Collections:CMEMS - Artigos em revistas internacionais/Papers in international journals

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