Please use this identifier to cite or link to this item: http://hdl.handle.net/1822/55843

TitleNano-sculptured Janus-like TiAg thin films obliquely deposited by GLAD co-sputtering for temperature sensing
Author(s)Pedrosa, Paulo Eduardo Teixeira Baptista
Ferreira, Armando José Barros
Martin, Nicolas
Yazdi, Mohammad Arab Pour
Billard, Alain
Lanceros-Méndez, S.
Vaz, F.
KeywordsGlancing angle co-deposition
Electrical resistivity
Anisotropy
TCR
Temperature sensing
Janus-like TiAg films
Nano-sculptured thin films
Issue date2018
PublisherIOP Publishing
JournalNanotechnology
Abstract(s)Inclined, zigzag and spiral TiAg films were prepared by glancing angle co-deposition, using two distinct Ti and Ag targets with a particle incident angle of 80 degrees and Ag contents ranging from 20 to 75 at%. The effect of increasing Ag incorporation and columnar architecture change on the morphological, structural and electrical properties of the films was investigated. It is shown that inclined columnar features (beta = 47 degrees) with high porosity were obtained for 20 at% Ag, with the column angle sharply decreasing (beta = 21 degrees) for 50 at% Ag, and steeply increasing afterwards until beta = 37 degrees for the film with 75 at% Ag. The sputtered films exhibit a rather well-crystallized structure for Ag contents >= 50 at%, with a TiAg (111) preferential growth. No significant oxidation was detected in all films, except for the one with 20 at% Ag, after two 298-473-298 K temperature cycles in air. The calculated temperature coefficient of resistivity (TCR) values vary between 1.4 and 5.5 x 10(-4)K(-1). Nano-sculptured spiral films exhibit consistently higher resistivity (rho = 1.5. x 10(-6) Omega m) and TCR values (2.9 x 10(-4)K(-1)) than the inclined one with the same Ag content (rho = 1.2 x 10(-6) Omega m and TCR = 2.0 x 10(-4)K(-1)). No significant changes are observed in the zigzag films concerning these properties. The effective anisotropy A(eff) at 473 K changes from 1.3 to 1.7 for the inclined films. Spiral films exhibit an almost completely isotropic behavior with A(eff) = 1.1. Ag-rich TiAg core + shell Janus-like columns were obtained with increasing Ag concentrations.
TypeArticle
URIhttp://hdl.handle.net/1822/55843
DOI10.1088/1361-6528/aacba8
ISSN0957-4484
Peer-Reviewedyes
AccessRestricted access (UMinho)
Appears in Collections:CDF - GRF - Artigos/Papers (with refereeing)

Files in This Item:
File Description SizeFormat 
Nano-sculptured Janus-like TiAg thin films obliquely deposited by GLAD co-sputtering for.pdf
  Restricted access
3,08 MBAdobe PDFView/Open

Partilhe no FacebookPartilhe no TwitterPartilhe no DeliciousPartilhe no LinkedInPartilhe no DiggAdicionar ao Google BookmarksPartilhe no MySpacePartilhe no Orkut
Exporte no formato BibTex mendeley Exporte no formato Endnote Adicione ao seu ORCID