Utilize este identificador para referenciar este registo:
https://hdl.handle.net/1822/55841
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Campo DC | Valor | Idioma |
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dc.contributor.author | Ferreira, Armando José Barros | por |
dc.contributor.author | Martin, Nicolas | por |
dc.contributor.author | Lanceros-Méndez, S. | por |
dc.contributor.author | Vaz, F. | por |
dc.date.accessioned | 2018-09-13T10:51:54Z | - |
dc.date.issued | 2018 | - |
dc.identifier.issn | 0040-6090 | por |
dc.identifier.uri | https://hdl.handle.net/1822/55841 | - |
dc.description.abstract | This work reports on the preparation and characterization of Zinc Oxide (ZnO) thin films, exploring their anisotropic electrical resistivity behaviour evolution as a function of the different preparation conditions. Results show that by increasing the oxygen content in the work gas flow, the electrical resistivity increases from about 2.4 x 10(-2) Omega.cm (common in fairly conductive-like materials) to values in order of M Omega.cm, which is typical of materials that vary from semiconducting to roughly insulating type. Regarding the thin films structural behaviour, a relatively clear evolution of the preferential growth becomes clear when preparing the films within the three different regimes. The X-ray diffraction (XRD) patterns revealed the development of a polycrystalline hexagonal-like structure, confirmed by the presence of dominant and very intense ZnO (002) and ZnO (101) diffraction peaks. A change in preferential growth was noticed with the change in the preparation conditions.By in-air annealing the samples from room temperature (RT) up to 200 degrees C and cooling down to RT again, the differences between the resistivity values along the xx and yy directions become significant, a clear sign of the anisotropic nature of the films. The anisotropy obtained during the annealing cycles of the films increased from 0.98 to 1.10 and, consequently, the Temperature Coefficient of Resistance, TCR, increased in both xx and yy directions, from TCRxx (and yy) similar to 9.0x10(-4) to TCRxx = 6.82 x 10(-3) and TCRyy = 5.97 x 10(-3) degrees C-1. Important also to note is that the increase of the grain size of the films showed to have a significant effect in the effective anisotropy, revealing to be a major factor to take into account. | por |
dc.description.sponsorship | This work was supported by the Portuguese Foundation for Science and Technology (FCT) in the framework of the Strategic Funding UID/FIS/04650/2013 and project PTDC/EEI-SII/5582/2014 and by the Region of Franche-Comte, the French RENATECH network and performed in cooperation with the Labex ACTION program (contract ANR-11-LABX-01-01). A. Ferreira thanks the FCT for grant SFRH/BPD/102402/2014. Financial support from the Basque Government Industry Department under the ELKARTEK Program is also acknowledged. | por |
dc.language.iso | eng | por |
dc.publisher | Elsevier | por |
dc.relation | info:eu-repo/grantAgreement/FCT/6817 - DCRRNI ID/UID%2FFIS%2F04650%2F2013/PT | por |
dc.relation | info:eu-repo/grantAgreement/FCT/9471 - RIDTI/PTDC%2FEEI-SII%2F5582%2F2014/PT | - |
dc.relation | info:eu-repo/grantAgreement/FCT/FARH/SFRH%2FBPD%2F102402%2F2014/PT | - |
dc.rights | restrictedAccess | por |
dc.subject | Zinc oxide | por |
dc.subject | Magnetron sputtering | por |
dc.subject | Electrical properties | por |
dc.subject | Resistive sensor | por |
dc.title | Tuning electrical resistivity anisotropy of ZnO thin films for resistive sensor applications | por |
dc.type | article | - |
dc.peerreviewed | yes | por |
oaire.citationStartPage | 93 | por |
oaire.citationEndPage | 99 | por |
oaire.citationVolume | 654 | por |
dc.date.updated | 2018-09-13T10:02:03Z | - |
dc.identifier.doi | 10.1016/j.tsf.2018.03.090 | por |
dc.description.publicationversion | info:eu-repo/semantics/publishedVersion | por |
dc.subject.wos | Science & Technology | - |
sdum.export.identifier | 5197 | - |
sdum.journal | Thin Solid Films | por |
Aparece nas coleções: | CDF - GRF - Artigos/Papers (with refereeing) |
Ficheiros deste registo:
Ficheiro | Descrição | Tamanho | Formato | |
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Manuscript.pdf Acesso restrito! | 4,51 MB | Adobe PDF | Ver/Abrir |