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TitleOn-chip integrated silicon bulk-micromachined soil moisture sensor based on the DPHP method
Author(s)Valente, A.
Couto, Carlos
Correia, J. H.
KeywordsSoil moisture sensor
Soil water content
Heat capacity sensor
Integrated microsensor
Issue date10-Jun-2001
CitationINTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS, 11, Munich, 2001 - "International Conference on Solid-State Semsors and Actuators". [Munich, Springer], 2001
Abstract(s)This paper reports the design, modelling, fabrication and assembly of a silicon bulk-micromachined soil moisture microsensor using the Dual-Probe Heat-Pulse (DPHP) method. Soil humidity measurement is essential to studysoil preservation and control the development of plants, namely in closed ecosystem. The DPHP method uses a heater (Peltier effect) and a temperature probe (Seebeck effect) to determine the volumetric heat capacity of the soil and hence water content ( θv). This is the first time that the DPHP method is implemented in a microdevice and the first integrated sensor for soil moisture. This microdevice is more suited to measure at different soil depths in a non-destructive and automated manner.
TypeConference paper
AccessOpen access
Appears in Collections:DEI - Artigos em atas de congressos internacionais

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