Please use this identifier to cite or link to this item: http://hdl.handle.net/1822/50706

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dc.contributor.authorDias, Rosana A.por
dc.contributor.authorMoreira, Eurico Estevespor
dc.contributor.authorRibeiro, Igorpor
dc.contributor.authorCosta, Margaretpor
dc.contributor.authorFonseca, Helderpor
dc.contributor.authorCardoso, Susanapor
dc.contributor.authorFreitas, Paulopor
dc.contributor.authorRocha, Luís Alexandre Machadopor
dc.contributor.authorGaspar, Joãopor
dc.date.accessioned2018-02-20T14:27:51Z-
dc.date.issued2017-
dc.identifier.isbn978-1-5386-2732-7por
dc.identifier.urihttp://hdl.handle.net/1822/50706-
dc.description.abstractThis digest reports for the first time on the concept, fabrication and characterization of a spintronics magnetic readout for hybrid MEMS. The method uses magnetic sensors (spin valves) and permanent magnets (on both the movable and the fixed parts of the MEMS structure) to detect displacement. The use of such transduction method has several potential advantages: it allows a small form factor, straightforward readout electronics, xyz integrability, and does not require high aspect ratio silicon gaps, allowing the replacement of conventional capacitive transductors by a mechanism that occupies much less chip area. The proof-of-concept is presented for an in-plane movable structure. Both the full-gap linear displacement and the electrostatic pull-in behavior are monitored and displayed.por
dc.language.isoengpor
dc.publisherIEEEpor
dc.rightsrestrictedAccesspor
dc.subjectSpintronicspor
dc.subjectMagnetic readoutpor
dc.subjectMEMSpor
dc.subjectDisplacement sensingpor
dc.titleNovel magnetic readout for hybrid spintronic MEMS devicespor
dc.typeconferencePaperpor
dc.peerreviewedyespor
oaire.citationConferenceDate18 - 22 June 2017por
sdum.event.titleTransducers 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystemspor
sdum.event.typeconferencepor
oaire.citationStartPage818por
oaire.citationEndPage821por
oaire.citationConferencePlaceKaohsiung, Taiwanpor
dc.date.updated2018-02-07T16:31:15Z-
dc.identifier.doi10.1109/TRANSDUCERS.2017.7994174por
dc.description.publicationversioninfo:eu-repo/semantics/publishedVersionpor
dc.subject.wosScience & Technologypor
sdum.export.identifier2602-
sdum.conferencePublicationTransducers'17, Kaohsiung: the 19th International Conference on Solid-State Sensors, Actuators and Microsystemspor
sdum.bookTitle2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS)por
Appears in Collections:DEI - Artigos em atas de congressos internacionais

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