Single-chip CMOS optical microspectrometer with sensor bus interface

Abstract

A single-chip CMOS microspectrometer containing an array of 16 addressable fixed-cavity Fabry-Perot etalons, photodetectors and circuits for read-out, multiplexing and driving the ISS sensor bus has been fabricated. This resulted in a chip that can operate using only five external connections (including Vdd and Vss) covering the optical range of 400-500 nm with FWHM=18nm. Frequency output and serial bus interface allow easy multi-sensor, multi-chip interfacing using a microcontroller.