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|Title:||Silver-based reflective coatings for micromachined optical filters|
Correia, J. H.
Wolffenbuttel, R. F.
|Abstract(s):||Silver films of 40 nm thickness, evaporated on a 300 nm thick low-stress silicon nitride layer, are used as high-quality mirrors operating in the visible and near IR spectral range. Using a silicon nitride membrane under tension, within a square Si frame after bulk micromachining, improves the initial mirror flatness. Two parallel mirrors, with square aperture of up to 2x2 mm2 and an electrostatically controlled spacing, form a tunable Fabry-Perot optical filter. Investigation of the silver-based reflective coatings, and mirror characterisation, including influence of bulk micromachining, are presented.|
|Description:||Comunicação apresentada no MME'98, Ulvik, Norway, 3-5 June 1998.|
|Appears in Collections:||DEI - Artigos em atas de congressos internacionais|
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