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TitleSilver-based reflective coatings for micromachined optical filters
Author(s)Bartek, M.
Correia, J. H.
Wolffenbuttel, R. F.
KeywordsNitride membrane
Silver mirrors
Fabry-Perot interferometer
Issue date3-Jun-1998
Abstract(s)Silver films of 40 nm thickness, evaporated on a 300 nm thick low-stress silicon nitride layer, are used as high-quality mirrors operating in the visible and near IR spectral range. Using a silicon nitride membrane under tension, within a square Si frame after bulk micromachining, improves the initial mirror flatness. Two parallel mirrors, with square aperture of up to 2x2 mm2 and an electrostatically controlled spacing, form a tunable Fabry-Perot optical filter. Investigation of the silver-based reflective coatings, and mirror characterisation, including influence of bulk micromachining, are presented.
TypeConference paper
DescriptionComunicação apresentada no MME'98, Ulvik, Norway, 3-5 June 1998.
AccessOpen access
Appears in Collections:DEI - Artigos em atas de congressos internacionais

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