Utilize este identificador para referenciar este registo:
https://hdl.handle.net/1822/4453
Título: | A miniaturized self-calibrated pyrometer microsystem |
Autor(es): | Gonçalves, L. M. Gomes, L. G. Ribeiro, S. F. Couto, Carlos Correia, J. H. |
Palavras-chave: | Micropyrometer IR radiation Thermopile Peltier |
Data: | Set-2003 |
Editora: | Universidade do Minho |
Citação: | EUROSENSORS, 17, Guimarães, 2003 – “Eurosensors : proceedings of the european conference on solid-state transducers”. [Guimarães]: Universidade do Minho, 2003. ISBN 972-98603-1-9. p. 568-569. |
Resumo(s): | paper describes the design, modeling and optimization of a miniaturized self-calibrated pyrometer to detect infrared radiation (in 5-20 µm range of wavelengths) in order to measure the real temperature of objects without contact. The microsystem consists of a thermally insulated absorbing area and two thermopiles with the hot junctions in the absorbing area and the cold junctions on a heat sink (i.e. the silicon bulk). The complete microsystem is in silicon planar technology and each thermopile has a different reference temperature, biased by a Peltier microstructure near to the cold junction of the thermopile. A silicon die passivated with a silicon nitride membrane is the ground floor of all microsystem. The absorbing area, a black gold strip on the silicon nitride membrane is obtained by anisotropic etching of the bulk silicon from the back of the wafer. The pyrometer microsystem is composed by: the IR optical filter on the top, the electronic system built in CMOS technology added by Multi-Chip-Module (MCM) techniques and the pyrometer. Application of a network of pyrometers in textile industry is the final goal. |
Tipo: | Artigo |
URI: | https://hdl.handle.net/1822/4453 |
ISBN: | 972-98603-1-9 |
Arbitragem científica: | yes |
Acesso: | Acesso aberto |
Aparece nas coleções: | DEI - Artigos em atas de congressos internacionais |
Ficheiros deste registo:
Ficheiro | Descrição | Tamanho | Formato | |
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Eurosensors final TP20.pdf | 471,93 kB | Adobe PDF | Ver/Abrir |