Please use this identifier to cite or link to this item: http://hdl.handle.net/1822/4453

TitleA miniaturized self-calibrated pyrometer microsystem
Author(s)Gonçalves, L. M.
Gomes, L. G.
Ribeiro, S. F.
Couto, Carlos
Correia, J. H.
KeywordsMicropyrometer
IR radiation
Thermopile
Peltier
Issue dateSep-2003
PublisherUniversidade do Minho
CitationEUROSENSORS, 17, Guimarães, 2003 – “Eurosensors : proceedings of the european conference on solid-state transducers”. [Guimarães]: Universidade do Minho, 2003. ISBN 972-98603-1-9. p. 568-569.
Abstract(s)paper describes the design, modeling and optimization of a miniaturized self-calibrated pyrometer to detect infrared radiation (in 5-20 µm range of wavelengths) in order to measure the real temperature of objects without contact. The microsystem consists of a thermally insulated absorbing area and two thermopiles with the hot junctions in the absorbing area and the cold junctions on a heat sink (i.e. the silicon bulk). The complete microsystem is in silicon planar technology and each thermopile has a different reference temperature, biased by a Peltier microstructure near to the cold junction of the thermopile. A silicon die passivated with a silicon nitride membrane is the ground floor of all microsystem. The absorbing area, a black gold strip on the silicon nitride membrane is obtained by anisotropic etching of the bulk silicon from the back of the wafer. The pyrometer microsystem is composed by: the IR optical filter on the top, the electronic system built in CMOS technology added by Multi-Chip-Module (MCM) techniques and the pyrometer. Application of a network of pyrometers in textile industry is the final goal.
TypeArticle
URIhttp://hdl.handle.net/1822/4453
ISBN972-98603-1-9
Peer-Reviewedyes
AccessOpen access
Appears in Collections:DEI - Artigos em atas de congressos internacionais

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