Please use this identifier to cite or link to this item: http://hdl.handle.net/1822/4274

TitleIntegrated silicon microspectrometers
Author(s)Kong, S. H.
Correia, J. H.
Bartek, M.
Wolffenbuttel, R. F.
KeywordsMicrointerferometers
Integrated silicon microspectrometers
Issue dateSep-2001
PublisherIEEE
JournalIEEE Instrumentation & Measurement Magazine
Citation"IEEE Instrumentation & Measurement Magazine". ISSN 1094-6969. 4:3 (Sept. 2001) 34-38.
Abstract(s)Microspectrometers, which read color and the results from analytical chemistry, are used for quality inspection in industry and agiculture. They read the chromatography results by measuring the infrared (IR) absorption of the chemical constituent between the IR source and the grating. Micromachining can implement the dispersion and detection elements in a silicon microspectrometer so that it can analyze the spectrum of incident light. The microspectrometer may either operate an array of detectors, each with a uniform spectral response, or scan the dispersion element using a single calibrated detector. Compared to bulky macroscopic devices, this microspectrometer has inferior spectral resolution but its small size and low cost more than compensates for this limitation in many applications.
TypeArticle
URIhttp://hdl.handle.net/1822/4274
ISSN1094-6969
Peer-Reviewedyes
AccessOpen access
Appears in Collections:DEI - Artigos em revistas internacionais

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