Utilize este identificador para referenciar este registo:
https://hdl.handle.net/1822/3775
Título: | Bulk-micromachined tunable fabry–perot microinterferometer for the visible spectral range |
Autor(es): | Correia, J. H. Bartek, M. Wolffenbuttel, R. F. |
Palavras-chave: | Interferometer Fabry–Perot Spectrometer FWHM Finesse |
Data: | 1999 |
Editora: | Elsevier |
Revista: | Sensors and Actuators A: Physical |
Citação: | "Sensors and actuators A : Physical". ISSN 0924-4247. 76 (1999) 191-196. |
Resumo(s): | The design, fabrication and measured characteristics of a bulk-micromachined tunable Fabry–Perot microinterferometer (FPMI) for the visible spectral range are presented. The FPMI is formed by two parallel 40 nm thick silver mirrors supported by a 300 nm low tensile stress silicon nitride membrane with a square aperture (side length of 2 mm) and initial cavity gap of 1.2 µm. One of the mirrors is fixed, the other is under tension on a movable Si frame, which is electrostatically deflected, using several distributed electrodes, to control cavity spacing and mirror parallelism. Performance achieved is: high flatness of the mirrors (λ/10 for the visible part of the spectrum), low control voltages (<21 V for 450 nm deflection) and simple fabrication. |
Tipo: | Artigo |
URI: | https://hdl.handle.net/1822/3775 |
ISSN: | 0924-4247 |
Arbitragem científica: | yes |
Acesso: | Acesso aberto |
Aparece nas coleções: | DEI - Artigos em revistas internacionais |
Ficheiros deste registo:
Ficheiro | Descrição | Tamanho | Formato | |
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artigo3.pdf | Documento principal | 932 kB | Adobe PDF | Ver/Abrir |