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TitleBulk-micromachined tunable fabry–perot microinterferometer for the visible spectral range
Author(s)Correia, J. H.
Bartek, M.
Wolffenbuttel, R. F.
KeywordsInterferometer Fabry–Perot
Issue date1999
JournalSensors and Actuators A: Physical
Citation"Sensors and actuators A : Physical". ISSN 0924-4247. 76 (1999) 191-196.
Abstract(s)The design, fabrication and measured characteristics of a bulk-micromachined tunable Fabry–Perot microinterferometer (FPMI) for the visible spectral range are presented. The FPMI is formed by two parallel 40 nm thick silver mirrors supported by a 300 nm low tensile stress silicon nitride membrane with a square aperture (side length of 2 mm) and initial cavity gap of 1.2 µm. One of the mirrors is fixed, the other is under tension on a movable Si frame, which is electrostatically deflected, using several distributed electrodes, to control cavity spacing and mirror parallelism. Performance achieved is: high flatness of the mirrors (λ/10 for the visible part of the spectrum), low control voltages (<21 V for 450 nm deflection) and simple fabrication.
AccessOpen access
Appears in Collections:DEI - Artigos em revistas internacionais

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