Utilize este identificador para referenciar este registo:
https://hdl.handle.net/1822/27575
Título: | Structural evolution of Ti-Al-Si-N nanocomposite coating |
Autor(es): | Carvalho, S. Rebouta, L. Ribeiro, E. Vaz, F. Tavares, C. J. Alves, E. Barradas, N. P. Rivière, J. P. |
Palavras-chave: | Ti-Al-Si-N Superhard nanocomposites Solid solution hardening Magnetron sputtering |
Data: | 2009 |
Editora: | Elsevier 1 |
Revista: | Vacuum |
Resumo(s): | Ti–Si–Al–N films were prepared by rf reactive magnetron sputtering, in static and rotation modes, using a wide range of different deposition conditions, which created conditions to obtain Ti–Al–Si–N coatings with different structural arrangements. Films prepared below a critical nitrogen flow, under conditions out of thermodynamic equilibrium, revealed a preferential growth of an fcc (Ti,Al,Si)Nx compound with a small N deficiency. With nitrogen flow above that critical value, the reduction of the lattice parameter was no longer detected. However, a thermal annealing showed that a complete thermodynamically driven segregation of the TiN and Si3N4 phases was not yet obtained. The segregation upon annealing induced a self-hardening and showed a multiphase system, where the crystalline TiN, (Ti,Al)N and (Ti,Al,Si)Nx phases were identified by X-ray diffraction. This behavior is due to the de-mixing of the solid solution associated to a small N deficiency. |
Tipo: | Artigo |
URI: | https://hdl.handle.net/1822/27575 |
DOI: | 10.1016/j.vacuum.2009.03.009 |
ISSN: | 0042-207X |
Arbitragem científica: | yes |
Acesso: | Acesso aberto |
Aparece nas coleções: | CDF - GRF - Artigos/Papers (with refereeing) |
Ficheiros deste registo:
Ficheiro | Descrição | Tamanho | Formato | |
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Structural evolution of Ti–Al–Si–N nanocomposite coatings.pdf | 549,57 kB | Adobe PDF | Ver/Abrir |