Utilize este identificador para referenciar este registo:
https://hdl.handle.net/1822/23980
Título: | Tuneable properties of aluminium oxynitride thin films |
Autor(es): | Borges, Joel Nuno Pinto Barradas, Nuno P. Alves, Eduardo Martin, Nicolas Beaufort, Marie France Camelio, Sophie Eyidi, Dominique Girardeau, Thierry Paumier, Fabien Rivière, J. P. Vaz, F. Marques, L. |
Palavras-chave: | Reactive DC magnetron sputtering Thin films AlOxNy Target potential Deposition rate Composition Structure Grain size Morphology Percolating network XPS TEM Electrical and optical properties Reflectance Refractive index Extinction coefficient Electrical resistivity Temperature coefficient of resistance (TCR) Broadband absorption |
Data: | Abr-2013 |
Editora: | Bentham Science Publishers |
Resumo(s): | In this subchapter is discussed some characteristics and properties of AlOxNy thin films produced by reactive DC magnetron sputtering. The films were deposited using Ar as working gas and a reactive gas mixture of N2+O2 (17:3). The reactive gas flow was varied in order to produce a wide range of chemical compositions. Sub-stoichiometric AlOxNy films, with CO+N/CAl atomic ratios up to 0.85 were produced, with Al-type crystalline structure. Transmission electron microscopy (TEM) analysis and X-ray photoelectron spectroscopy (XPS) spectra suggests that the films are a percolating network, composed by aluminium nanocrystals with different shapes and sizes embedded in an oxide/nitride matrix. The particular composition, structure and morphology of the films results in very different electrical properties, which can be explained using a tunnel barrier conduction mechanism for the electric charge transport, as well as distinct optical responses, such as an unusual large broadband absorption for some films. |
Tipo: | Capítulo de livro |
URI: | https://hdl.handle.net/1822/23980 |
Versão da editora: | http://www.benthamscience.com/ebooks/9781608051564/index.htm |
Arbitragem científica: | yes |
Acesso: | Acesso restrito UMinho |
Aparece nas coleções: | CDF - FCT - Artigos/Papers (with refereeing) |
Ficheiros deste registo:
Ficheiro | Descrição | Tamanho | Formato | |
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repos_L17_2013.pdf Acesso restrito! | Repos_L17_2013 | 1,49 MB | Adobe PDF | Ver/Abrir |