Please use this identifier to cite or link to this item: http://hdl.handle.net/1822/21098

TitleInvasive neural electrodes structure fabrication based on aluminum wafers
Author(s)Peixoto, A. C.
Silva, A. F.
Dias, N. S.
Correia, J. H.
KeywordsNeural electrode
Invasive
Microelectrodes
Microneedle
Dicing
Aluminum
Silicon
Issue date2012
Abstract(s)Over the last two decades, many researchers have developed a variety of neural electrode types, taking full advantage of silicon microtechnologies. Silicon wafers became the raw structural material for the majority of the developed electrodes, and several techniques had to be studied and established in order to fabricate a feasible silicon-based neural probe. This paper shows an alternative raw material for the structure construction, the aluminum. With the same techniques used before (dicing and etching), it is possible to fabricate an array structure made from aluminum with 1.5 mm long needles, individually addressable. This structure presents a superior performance both mechanically and electrically, when compared to the silicon-based solutions. Furthermore, from the practical perspective, it ensures a more consistent fabrication procedure and a more competitive cost.
TypeAbstract
URIhttp://hdl.handle.net/1822/21098
Peer-Reviewedyes
AccessRestricted access (UMinho)
Appears in Collections:CAlg - Resumos em livros de atas/Abstracts in proceedings
DEI - Artigos em atas de congressos internacionais

Files in This Item:
File Description SizeFormat 
Invasive neural electrodes structure fabrication based on aluminum wafers.pdf
  Restricted access
Full-article162,75 kBAdobe PDFView/Open

Partilhe no FacebookPartilhe no TwitterPartilhe no DeliciousPartilhe no LinkedInPartilhe no DiggAdicionar ao Google BookmarksPartilhe no MySpacePartilhe no Orkut
Exporte no formato BibTex mendeley Exporte no formato Endnote Adicione ao seu ORCID