Microfabrication and characterization of thin-films solid-state rechargeable lithium battery

Abstract

This paper presents the microfabrication and materials characterization of thin-film solid-state rechargeable lithium batteries. Film solidstate batteries are ideal power sources for standalone microsystems where a high-level of integration is required. Solid-state thin-film batteries are intrinsically safe, have a larger life cycle, a faster charge/discharge cycling and a bigger capacity by cm 3 then the conventional ones. The fabrication materials used are LiCoO2, LIPON and metal lithium in cathode, electrolyte and anode respectively. The LiCoO2 and LIPON films were deposited by RF magnetron sputtering technique and the metal lithium by thermal-evaporation technique.