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TitleMicrofabrication and characterization of thin-films solid-state rechargeable lithium battery
Author(s)Ribeiro, J. F.
Silva, M. F.
Gonçalves, L. M.
Silva, Maria Manuela
Correia, J. H.
KeywordsSolid-state films battery
Integrated batteries
Energy-harvesting microsystems
Issue date26-Sep-2010
PublisherUniversity of Twente
Abstract(s)This paper presents the microfabrication and materials characterization of thin-film solid-state rechargeable lithium batteries. Film solidstate batteries are ideal power sources for standalone microsystems where a high-level of integration is required. Solid-state thin-film batteries are intrinsically safe, have a larger life cycle, a faster charge/discharge cycling and a bigger capacity by cm 3 then the conventional ones. The fabrication materials used are LiCoO2, LIPON and metal lithium in cathode, electrolyte and anode respectively. The LiCoO2 and LIPON films were deposited by RF magnetron sputtering technique and the metal lithium by thermal-evaporation technique.
TypeConference paper
AccessRestricted access (UMinho)
Appears in Collections:CAlg - Artigos em livros de atas/Papers in proceedings
CDQuim - Comunicações e Proceedings
DEI - Artigos em atas de congressos internacionais

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