Utilize este identificador para referenciar este registo:
https://hdl.handle.net/1822/14737
Título: | A novel SOI-MEMS ‘Micro- Swing’ time-accelerometer operating in two time-based transduction modes for high sensitivity and extended range |
Autor(es): | Rajaraman, V. Hau, B. S. Rocha, Luís A. Dias, R. A. Makinwa, K. A. A. Dekker, R. |
Palavras-chave: | Micro-swing accelerometer Time accelerometer Pull-in time Piezoresistive sensing Transit time Time-of-flight Piezoresistive sensing Epitaxial piezoresistor Capacitive sensing Electrostatic actuation/driving Inertial sensor SOI-MEMS |
Data: | 5-Jun-2011 |
Editora: | IEEE |
Resumo(s): | Here we report the design, modelling, fabrication and initial characterisation results of a new SOI-MEMS “micro-swing” time-accelerometer. Time-based acceleration sensing can be performed using either the embedded piezoresistors or the capacitive sense electrodes. The accelerometer can be operated in two distinct time-based transduction modes aimed at high sensitivity and extended operation range, depending on the applied drive voltage (α.VPull-In). A high sensitivity of 0.914μs/μg is achieved using the pull-in time metastable (PITMS) region (for, α = 1.01) over a small acceleration range from ±0.02g-±0.79g. Extended operation range up to ±2g can be achieved through mechanical time-of-flight (TOF) sensing (for, α ≥ 1.4). Preliminary measurements indicate device functionality and a pull-in transit time of 11ms for a tilt-acceleration corresponding to 70mg. |
Tipo: | Artigo em ata de conferência |
URI: | https://hdl.handle.net/1822/14737 |
ISBN: | 978-1-4577-0157-3 |
DOI: | 10.1109/TRANSDUCERS.2011.5969225 |
Versão da editora: | http://ieeexplore.ieee.org/ |
Arbitragem científica: | yes |
Acesso: | Acesso restrito UMinho |
Aparece nas coleções: | IPC - Resumos alargados em actas de encontros científicos internacionais com arbitragem |
Ficheiros deste registo:
Ficheiro | Descrição | Tamanho | Formato | |
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Transducers2011_Vijay.pdf Acesso restrito! | 854,85 kB | Adobe PDF | Ver/Abrir |