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https://hdl.handle.net/1822/13483
Título: | Ti–Si–C thin films produced by magnetron sputtering : correlation between physical properties, mechanical properties and tribological behavior |
Autor(es): | Cunha, L. Vaz, F. Moura, C. Munteanu, D. Ionescu, C. Rivière, J. P. Le Bourhis, E. |
Palavras-chave: | Ti–Si–C coatings Multifunctional coatings Sputtering |
Data: | 2010 |
Editora: | American Scientific Publishers |
Revista: | Journal of Nanoscience and Nanotechnology |
Resumo(s): | Ti–Si–C thin films were deposited onto silicon, stainless steel and high-speed steel substrates by magnetron sputtering, using different chamber configurations. The composition of the produced films was obtained by Electron Probe Micro-Analysis (EPMA) and the structure by X-ray diffraction (XRD). The hardness and residual stresses were obtained by depth-sensing indentation and substrate deflection measurements (using Stoney’s equation), respectively. The tribological behavior of the produced films was studied by pin-on-disc. The increase of the concentration of non-metallic elements (carbon and silicon) caused significant changes in their properties. Structural analysis revealed the possibility of the coexistence of different phases in the prepared films, namely Ti metallic phase ( alpha-Ti or beta-Ti) in the films with higher Ti content. The coatings with highest carbon contents, exhibited mainly a sub-stoichiometric fcc NaCl TiC-type structure. These structural changes were also confirmed by resistivity measurements, whose values ranged from 10E3 Ohm/sq for low non-metal concentration, up to 10E6 Ohm /sq for the highest metalloid concentration. Astrong increase of hardness and residual stresses was observed with the increase of the non-metal concentration in the films. The hardness (H) values ranged between 11 and 27 GPa, with a clear dependence on both crystalline structure and composition features. Following the mechanical behavior, the tribological results showed similar trends, with both friction coefficients and wear revealing also a straight correlation with the composition and crystalline structure of the coatings. |
Tipo: | Artigo |
URI: | https://hdl.handle.net/1822/13483 |
DOI: | 10.1166/jnn.2010.1428 |
ISSN: | 1533-4880 |
Versão da editora: | http://www.aspbs.com/jnn/ |
Arbitragem científica: | yes |
Acesso: | Acesso aberto |
Aparece nas coleções: | CDF - GRF - Artigos/Papers (with refereeing) |
Ficheiros deste registo:
Ficheiro | Descrição | Tamanho | Formato | |
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JNN-10(4)-2010.pdf | Documento principal | 1,01 MB | Adobe PDF | Ver/Abrir |