Please use this identifier to cite or link to this item: http://hdl.handle.net/1822/11980

TitleA planar thermoelectric power generator for integration in wearable microsystems
Author(s)Carmo, João Paulo Pereira
Gonçalves, L. M.
Wolffenbuttel, R. F.
Correia, J. H.
KeywordsThermoelectric
Peltier
Microcooler
Telluride
Energy harvesting
Issue date1-May-2010
PublisherElsevier
JournalSensors and Actuators A: Physical
Citation"Sensors and Actuators A : Physical". 161:1-2 (June 2010) 199-204.
Abstract(s)A technique for IC-compatible fabrication of a planar (in-plane) thermoelectric (TE) power generator using a thermopile composed of n-type bismuth telluride (Bi2Te3) and p-type antimony telluride (Sb2Te3) thin-films is presented. The research demonstrates that the thermal co-evaporation of bismuth/antimony (Bi/Sb) and telluride (Te) is the most suitable deposition technique. The measurements showed TE performance properties of the deposited thin-films that are comparable to those reported for the same materials in the bulk form. The measurements showed absolute values of the Seebeck coefficient in the range 91–248 VK−1, an electrical resistivity in the 7.6–39.1 m range and a thermal conduction between 1.3 and 1.8Wm−1 K−1. The best resulting figures-of-merit, ZT, at room temperatures were 0.97 and 0.56 (equivalent to power-factors, PF, of 4.87×10−3 and 2.8×10−3WK−1m−2) for the Bi2Te3 and Sb2Te3 thin-films, respectively. The IC-compatibility and the dependence of the TE performance on technological details, such as photolithography and wet etching used for patterning the thin-films have also been investigated. The converter dimensions for best performance were analysed and a prototype of a planar TE power generator was fabricated.
TypeArticle
URIhttp://hdl.handle.net/1822/11980
DOI10.1016/j.sna.2010.05.010
ISSN0924-4247
Peer-Reviewedyes
AccessOpen access
Appears in Collections:CAlg - Artigos em revistas internacionais/Papers in international journals
DEI - Artigos em revistas internacionais

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