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TitleThermoelectric generator and solid-state battery for stand-alone microsystems
Author(s)Carmo, João Paulo Pereira
Silva, M. F.
Ribeiro, J. F.
Gonçalves, L. M.
Correia, J. H.
KeywordsThermoelectric converters
Solid-state thin-films batteries
Issue date1-Aug-2010
PublisherIOP Publishing
JournalJournal of Micromechanics and Microengineering
Citation"Journal of Micromechanics and Microengineering".ISSN 0960-1317. 20:8 (Aug. 2010) 1-8.
Abstract(s)This paper presents a thermoelectric (TE) generator and a solid-state battery for powering microsystems. Prototypes of TE generators were fabricated and characterized. The TE generator is a planar microstructure based on thin films of n-type bismuth telluride (Bi2Te3) and p-type antimony telluride (Sb2Te3), which were deposited using co-evaporation. The measurements on selected samples of Bi2Te3 and Sb2Te3 thin films indicated a Seebeck coefficient in the range of 90–250 μV K−1 and an in-plane electrical resistivity in the range of 7–17 μÄ m. The measurements also showed TE figures-of-merit, ZT, at room temperatures (T = 300 K) of 0.97 and 0.56, for thin films of Bi2Te3 and Sb2Te3, respectively (equivalent to a power factor, PF, of 4.87 mW K−2 m−1 and 2.81 mW K−2 m−1). The solid-state battery is based on thin films of: an anode of tin dioxide (SnO2), an electrolyte of lithium phosphorus oxynitride (LixPOyNz, known as LiPON) and a cathode of lithium cobaltate (LiCoO2, known as LiCO), which were deposited using the reactive RF (radio-frequency) sputtering. The deposition and characterization results of these thin-films layers are also reported in this paper.
AccessOpen access
Appears in Collections:CAlg - Artigos em revistas internacionais / Papers in international journals
DEI - Artigos em revistas internacionais

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