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https://hdl.handle.net/1822/84557
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Campo DC | Valor | Idioma |
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dc.contributor.author | Alves, Marina | por |
dc.contributor.author | Brito, Daniel | por |
dc.contributor.author | Carneiro, Joaquim A. O. | por |
dc.contributor.author | Teixeira, Vasco M. P. | por |
dc.contributor.author | Sadewasser, Sascha | por |
dc.date.accessioned | 2023-05-18T09:19:35Z | - |
dc.date.available | 2023-05-18T09:19:35Z | - |
dc.date.issued | 2023-04-06 | - |
dc.identifier.citation | Alves, M., Brito, D., Carneiro, J., Teixeira, V., & Sadewasser, S. (2023, June). Radio-frequency magnetron sputtering deposition process for In2O3:H transparent conductive oxide films for application in Cu(In,Ga)Se2 solar cells. Thin Solid Films. Elsevier BV. http://doi.org/10.1016/j.tsf.2023.139840 | - |
dc.identifier.issn | 0040-6090 | - |
dc.identifier.uri | https://hdl.handle.net/1822/84557 | - |
dc.description.abstract | Typical Cu(In,Ga)Se2 solar cells are deposited on an opaque molybdenum back contact. However, for applications such as bifacial, semi-transparent or tandem solar cells a transparent back contact is required, for which various transparent conductive oxides have been tested, such as indium- or fluorine-doped tin oxide, and hydrogen-doped indium oxide. Here, a radio-frequency magnetron sputtering deposition process for In2O3:H (IOH) is investigated, where H is supplied from a Ar/H2 (5%) mixed gas and oxygen is pulsed during the entire deposition at room temperature. After deposition, the films are post-annealed in vacuum to optimize their optoelectronic properties. The oxygen plays an important role for the optoelectronic properties, where a high content of oxygen allows higher transparency but also increases the film sheet resistance. Optimum oxygen and Ar/H2 partial pressures of 3.2 E-2 Pa and 13E-2 Pa, respectively, were found, producing IOH films with average visible transparency of 87% and sheet resistance after annealing of 19 Ohm/sq. | por |
dc.description.sponsorship | This work was supported by the project “Semi-Transparent Solar cells for building integrated photovoltaics (STAR-SOL)”, funded by FCT – Fundação para a Ciência e a Tecnologia (FCT‐FNR/0001/2018). Marina Alves thanks the Fundação para a Ciência e a Tecnologia (FCT), Portugal for the PhD Grant (2020.06063.BD). | - |
dc.language.iso | eng | por |
dc.publisher | Elsevier 1 | por |
dc.relation | info:eu-repo/grantAgreement/FCT/POR_NORTE/2020.06063.BD/PT | por |
dc.rights | openAccess | por |
dc.subject | Indium oxide | por |
dc.subject | Hydrogen-doped indium oxide | por |
dc.subject | Sputtering | por |
dc.subject | Transparent conductive oxide | por |
dc.subject | Sheet resistance | por |
dc.title | Radio-frequency magnetron sputtering deposition process for In2O3:H transparent conductive oxide films for application in Cu(In,Ga)Se2 solar cells | por |
dc.type | article | por |
dc.peerreviewed | yes | por |
dc.relation.publisherversion | https://www.sciencedirect.com/science/article/pii/S0040609023001700 | por |
oaire.citationStartPage | 139840 | por |
oaire.citationVolume | 774 | por |
dc.identifier.eissn | 1879-2731 | - |
dc.identifier.doi | 10.1016/j.tsf.2023.139840 | por |
dc.subject.fos | Engenharia e Tecnologia::Engenharia dos Materiais | por |
dc.subject.wos | Science & Technology | por |
sdum.journal | Thin Solid Films | por |
oaire.version | P | por |
dc.subject.ods | Energias renováveis e acessíveis | por |
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versão draft_1-s2.0-S0040609023001700-main.pdf | 1,18 MB | Adobe PDF | Ver/Abrir |