Utilize este identificador para referenciar este registo:
https://hdl.handle.net/1822/60289
Título: | Frequency modulated magnetometer using a double-ended tuning fork resonator |
Autor(es): | Moreira, Eurico Esteves Gaspar, João Rocha, Luís Alexandre Machado |
Data: | 9-Nov-2018 |
Editora: | Multidisciplinary Digital Publishing Institute |
Revista: | Proceedings |
Resumo(s): | A Lorentz force MEMS magnetometer based on a double-ended tuning fork (DETF) for out-of-plane sensing is presented here. A novel configuration using a hexagonal-shaped Lorentz force transducer is used, which simplifies the sensor configuration and improves its sensitivity. Frequency modulated devices were fabricated in an in-house process on silicon on insulator wafers (SOI) and then tested in vacuum. The final devices have a differential configuration and experimental characterization shows a sensitivity of 4.59 Hz/mT for a total input current (on the Lorentz bar) of 1.5 mA. |
Tipo: | Artigo em ata de conferência |
URI: | https://hdl.handle.net/1822/60289 |
DOI: | 10.3390/proceedings2131028 |
ISSN: | 2504-3900 |
Arbitragem científica: | yes |
Acesso: | Acesso aberto |
Aparece nas coleções: |
Ficheiros deste registo:
Ficheiro | Descrição | Tamanho | Formato | |
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proceedings-02-01028-v2.pdf | 800,38 kB | Adobe PDF | Ver/Abrir |
Este trabalho está licenciado sob uma Licença Creative Commons