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TitleFracture resistance of Ti-Ag thin films deposited on polymeric substrates for biosignal acquisition applications
Author(s)Etiemble, Aurélien
Lopes, Cláudia Jesus Ribeiro
Nkou Bouala, Galy Ingrid
Borges, Joel Nuno Pinto
Malchère, Annie
Langlois, Cyril
Vaz, F.
Steyer, Philippe
KeywordsBiomedical sensor
In situ electron microscopy
Magnetron sputtering deposition
Thin film
Issue date25-Jan-2019
PublisherElsevier B.V.
JournalSurface and Coatings Technology
CitationEtiemble, A., Lopes, C., et. al. (2019). Fracture resistance of Ti-Ag thin films deposited on polymeric substrates for biosignal acquisition applications. Surface and Coatings Technology, 358, 646-653
Abstract(s)The ability of magnetron sputtered Ti-Ag thin films deposited on polymeric substrate to be used as sensors for biosignal acquisition is investigated. Influence of the Ag content on the microstructure of TiAgx thin films prepared by magnetron sputtering is characterized by X-ray diffraction and electron microscopies. Three characteristic composition ranges are identified: Ti-rich, Ti-Ag and Ag-rich thin films. Their mechanical and electrical properties are then evaluated. Thin film fracture resistance on polymer substrate (polyethylene terephthalate) is studied by scanning electron microscopy micrographs performed during an in situ uniaxial stretching test. The key role of thin film composition and microstructure is highlighted, pointing out the positive effect of silver.
DescriptionAccepted manuscript
Publisher version
AccessRestricted access (Author)
Appears in Collections:CDF - GRF - Artigos/Papers (with refereeing)

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