Utilize este identificador para referenciar este registo:
https://hdl.handle.net/1822/23980
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Campo DC | Valor | Idioma |
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dc.contributor.author | Borges, Joel Nuno Pinto | - |
dc.contributor.author | Barradas, Nuno P. | - |
dc.contributor.author | Alves, Eduardo | - |
dc.contributor.author | Martin, Nicolas | - |
dc.contributor.author | Beaufort, Marie France | - |
dc.contributor.author | Camelio, Sophie | - |
dc.contributor.author | Eyidi, Dominique | - |
dc.contributor.author | Girardeau, Thierry | - |
dc.contributor.author | Paumier, Fabien | - |
dc.contributor.author | Rivière, J. P. | - |
dc.contributor.author | Vaz, F. | - |
dc.contributor.author | Marques, L. | - |
dc.date.accessioned | 2013-05-07T16:39:16Z | - |
dc.date.available | 2013-05-07T16:39:16Z | - |
dc.date.issued | 2013-04 | - |
dc.identifier.uri | https://hdl.handle.net/1822/23980 | - |
dc.description.abstract | In this subchapter is discussed some characteristics and properties of AlOxNy thin films produced by reactive DC magnetron sputtering. The films were deposited using Ar as working gas and a reactive gas mixture of N2+O2 (17:3). The reactive gas flow was varied in order to produce a wide range of chemical compositions. Sub-stoichiometric AlOxNy films, with CO+N/CAl atomic ratios up to 0.85 were produced, with Al-type crystalline structure. Transmission electron microscopy (TEM) analysis and X-ray photoelectron spectroscopy (XPS) spectra suggests that the films are a percolating network, composed by aluminium nanocrystals with different shapes and sizes embedded in an oxide/nitride matrix. The particular composition, structure and morphology of the films results in very different electrical properties, which can be explained using a tunnel barrier conduction mechanism for the electric charge transport, as well as distinct optical responses, such as an unusual large broadband absorption for some films. | por |
dc.description.sponsorship | “This research was supported by FEDER through the COMPETE program and by the Portuguese Foundation for Science and Technology (FCT) in the framework of the Strategic Project PEST-C/FIS/UI607/2011, as well as the project PTDC/CTM-NAN/112574/2009 and by Programa Pessoa 2010/2011, Cooperação Portugal/França, Proc.º441.00, Project“COLOURCLUSTER”. J. Borges also acknowledges FCT financial support under PhD grant Nº SFRH/BD/47118/2008 (financiado por POPH – QREN – Tipologia 4.1 – Formação Avançada, comparticipado pelo Fundo Social Europeu e por fundos nacionais do MCTES).” | por |
dc.language.iso | eng | por |
dc.publisher | Bentham Science Publishers | por |
dc.rights | restrictedAccess | por |
dc.subject | Reactive DC magnetron sputtering | por |
dc.subject | Thin films | por |
dc.subject | AlOxNy | por |
dc.subject | Target potential | por |
dc.subject | Deposition rate | por |
dc.subject | Composition | por |
dc.subject | Structure | por |
dc.subject | Grain size | por |
dc.subject | Morphology | por |
dc.subject | Percolating network | por |
dc.subject | XPS | por |
dc.subject | TEM | por |
dc.subject | Electrical and optical properties | por |
dc.subject | Reflectance | por |
dc.subject | Refractive index | por |
dc.subject | Extinction coefficient | por |
dc.subject | Electrical resistivity | por |
dc.subject | Temperature coefficient of resistance (TCR) | por |
dc.subject | Broadband absorption | por |
dc.title | Tuneable properties of aluminium oxynitride thin films | por |
dc.type | bookPart | por |
dc.peerreviewed | yes | por |
dc.relation.publisherversion | http://www.benthamscience.com/ebooks/9781608051564/index.htm | por |
sdum.publicationstatus | published | por |
oaire.citationStartPage | 195 | por |
oaire.citationEndPage | 229 | por |
oaire.citationTitle | Mettalic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods. Processes, Properties and Applications. | por |
oaire.citationVolume | 8 | por |
sdum.bookTitle | Mettalic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods. Processes, Properties and Applications. | por |
Aparece nas coleções: | CDF - FCT - Artigos/Papers (with refereeing) |
Ficheiros deste registo:
Ficheiro | Descrição | Tamanho | Formato | |
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repos_L17_2013.pdf Acesso restrito! | Repos_L17_2013 | 1,49 MB | Adobe PDF | Ver/Abrir |