Utilize este identificador para referenciar este registo:
https://hdl.handle.net/1822/21799
Título: | Influence of substrate temperature and post-annealing treatment on the microstructure and electric properties of ZnO:Al thin films deposited by sputtering |
Autor(es): | Garcia, Cibeli Navarro Belletti Ariza, E. Tavares, C. J. |
Palavras-chave: | ZnO:Al Sputtering EBSD TCO |
Data: | 2013 |
Editora: | Trans Tech Publications |
Revista: | Materials Science Forum |
Resumo(s): | In this work, it is reported the characterization of the microstructure and electric properties of ZnO:Al thin films produced by magnetron sputtering. An AZOY sputtering target (98 wt% ZnO + 2 wt% Al2O3) was used as source material. The microstructure, optical and electrical properties of ZnO:Al thin films were investigated and correlated with substrate deposition temperature and post-annealing temperature. It is demonstrated that the microstructural, electrical and optical properties of the as-deposited thin films are dependent on the substrate temperature. The crystalline texture of ZnO:Al was improved with temperature deposition as shown in the EBSD analysis and X-ray diffraction. ZnO:Al thin film deposited at 250 ºC exhibited very good electrical conductivity, as high as 200 S.cm-1 with an activation energy of 5.4 meV. As substrate temperature or heat treatment temperature is increased there is an apparent blue-shift on the absorption edge of the transmittance spectra, which can be explained by the Burnstein-Moss effect. |
Tipo: | Artigo em ata de conferência |
URI: | https://hdl.handle.net/1822/21799 |
DOI: | 10.4028/www.scientific.net/MSF.730-732.215 |
ISSN: | 0255-5476 |
Versão da editora: | http://www.scientific.net/MSF.730-732.215 |
Arbitragem científica: | yes |
Acesso: | Acesso restrito UMinho |
Aparece nas coleções: | CDF - GRF - Artigos/Papers (with refereeing) DEM - Artigos em revistas de circulação internacional com arbitragem científica |
Ficheiros deste registo:
Ficheiro | Descrição | Tamanho | Formato | |
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MSF.730-732.215-2012.pdf Acesso restrito! | 2,07 MB | Adobe PDF | Ver/Abrir |