Utilize este identificador para referenciar este registo:
https://hdl.handle.net/1822/21192
Título: | Autonomous MEMS Inclinometer |
Autor(es): | Alves, F. S. Dias, Rosana A. Cabral, Jorge Rocha, Luís A. |
Palavras-chave: | Pull-In voltage Inclinometer MEMS |
Data: | Jun-2012 |
Editora: | Springer |
Revista: | Lecture Notes in Computer Science (including Subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics) |
Resumo(s): | Pull-in voltage measurements are used in this work as the transduc-tion mechanism to build a novel microelectromechanical system (MEMS) incli-nometer. By successively bringing the microstructure to pull-in while measur-ing the pull-in voltage allows the detection of external accelerations. Moreover, the availability of asymmetric pull-in voltages that depend on the same mechan-ical structure and properties enables the implementation of an auto-calibrated thermal compensated inclinometer. The thermal compensation method is de-scribed and it relies on the measurement of pull-in voltages only. Both simulations and experiments are used to validate this novel approach and first results show a sensitivity of 50mV/º and a resolution of 0.006º |
Tipo: | Artigo em ata de conferência |
URI: | https://hdl.handle.net/1822/21192 |
ISBN: | 9783642313677 |
DOI: | 10.1007/978-3-642-31368-4_4 |
ISSN: | 0302-9743 |
Versão da editora: | www.springerlink.com |
Arbitragem científica: | yes |
Acesso: | Acesso restrito UMinho |
Aparece nas coleções: | IPC - Capítulos de Livros |
Ficheiros deste registo:
Ficheiro | Descrição | Tamanho | Formato | |
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FilipeAutonomous.pdf Acesso restrito! | Main Doc | 549,86 kB | Adobe PDF | Ver/Abrir |