Utilize este identificador para referenciar este registo:
https://hdl.handle.net/1822/14654
Título: | Auto-calibration of capacitive MEMS accelerometers based on pull-in voltage |
Autor(es): | Rocha, Luís A. Dias, R. A. Cretu, E. Mol, L. Wolffenbuttel, R. F. |
Palavras-chave: | Microsystems Auto-calibration |
Data: | Mar-2011 |
Editora: | Springer |
Revista: | Microsystems Technology |
Resumo(s): | This paper describes an electro-mechanical auto-calibration technique for use in capacitive MEMS accelerometers. Auto-calibration is achieved using the combined information derived from an initial measurement of the resonance frequency and the measurement of the pull-in voltages during device operation, with an estimation of process-induced variations in device dimensions from layout and deviations in material properties from the known nominal value. An experiment-based analytical model is used to compute the required electrostatic forces required to simulate external accelerations allowing the electro-mechanical calibration of the accelerometer. Measurements on fabricated devices confirm the validity of the proposed technique and electro-mechanical calibration is experimentally demonstrated. |
Tipo: | Artigo |
URI: | https://hdl.handle.net/1822/14654 |
DOI: | 10.1007/s00542-011-1252-8 |
ISSN: | 0946-7076 1432-1858 |
Versão da editora: | http://www.springerlink.com/ |
Arbitragem científica: | yes |
Acesso: | Acesso restrito UMinho |
Aparece nas coleções: | IPC - Artigos em revistas científicas internacionais com arbitragem |
Ficheiros deste registo:
Ficheiro | Descrição | Tamanho | Formato | |
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MicrosystemsTechnology.pdf Acesso restrito! | 613,86 kB | Adobe PDF | Ver/Abrir |