Utilize este identificador para referenciar este registo:
https://hdl.handle.net/1822/72243
Título: | Low-cost silicon neural probe: fabrication, electrochemical characterization and in vivo validation |
Autor(es): | Rodrigues, José Artur Oliveira Pimenta, Sara Pereira, José P. Gomes, Nuno M. Souto, Márcio R. Fernandes, Helena C. Caetano, Inês Cunha, Carina Isabel Soares Oliveira, João F. Ribeiro, João F. Correia, José H. |
Palavras-chave: | Neural probe |
Data: | 2021 |
Editora: | Springer |
Revista: | Microsystem Technologies |
Resumo(s): | This paper presents the fabrication of a silicon neural probe using low-cost microfabrication technologies, such as thin-films deposition, blade dicing, and photolithography. The metal stack that forms the 9 microelectrodes of 50 × 50 µm2 area, the tracks and the pads were made of Ti and Pt, while the passivation stack was SiO2 and Si3N4. The fabricated probe was characterized using electrochemical impedance spectroscopy, before and after deposition of poly(3,4-ethylene-dioxythiophene) (PEDOT) on Pt microelectrodes. The electrochemical deposition of PEDOT, a conductive polymer, reduced the impedance of the Pt microelectrodes. The neural probe with PEDOT was used for in vivo electrophysiological acute recordings in an adult rat. The extracellular recordings were filtered to obtain the spike and local field potential (LFP) data, using Butterworth bandpass filters of 400–6000 Hz and 0.1–300 Hz, respectively. The results obtained with the fabricated neural probe validated its functionality, comparing with the signals acquired with a commercial neural probe, and the viability of the fabrication process, which avoids high–cost and complex etching processes. |
Tipo: | Artigo |
URI: | https://hdl.handle.net/1822/72243 |
DOI: | 10.1007/s00542-020-04898-3 |
ISSN: | 0946-7076 |
e-ISSN: | 1432-1858 |
Versão da editora: | https://link.springer.com/article/10.1007/s00542-020-04898-3 |
Arbitragem científica: | yes |
Acesso: | Acesso restrito UMinho |
Aparece nas coleções: | CMEMS - Artigos em revistas internacionais/Papers in international journals |
Ficheiros deste registo:
Ficheiro | Descrição | Tamanho | Formato | |
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Rodrigues2021_Article_Low-costSiliconNeuralProbeFabr.pdf Acesso restrito! | Low cost silicon neural probe | 1,74 MB | Adobe PDF | Ver/Abrir |
Este trabalho está licenciado sob uma Licença Creative Commons