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TitleNovel magnetic readout for hybrid spintronic MEMS devices
Author(s)Dias, Rosana A.
Moreira, Eurico Esteves
Ribeiro, Igor
Costa, Margaret
Fonseca, Helder
Cardoso, Susana
Freitas, Paulo
Rocha, Luís Alexandre Machado
Gaspar, João
Magnetic readout
Displacement sensing
Issue date2017
Abstract(s)This digest reports for the first time on the concept, fabrication and characterization of a spintronics magnetic readout for hybrid MEMS. The method uses magnetic sensors (spin valves) and permanent magnets (on both the movable and the fixed parts of the MEMS structure) to detect displacement. The use of such transduction method has several potential advantages: it allows a small form factor, straightforward readout electronics, xyz integrability, and does not require high aspect ratio silicon gaps, allowing the replacement of conventional capacitive transductors by a mechanism that occupies much less chip area. The proof-of-concept is presented for an in-plane movable structure. Both the full-gap linear displacement and the electrostatic pull-in behavior are monitored and displayed.
TypeConference paper
AccessRestricted access (UMinho)
Appears in Collections:DEI - Artigos em atas de congressos internacionais

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