Utilize este identificador para referenciar este registo:
https://hdl.handle.net/1822/36973
Título: | Dependence of Ga-doped ZnO thin film properties on different sputtering process parameters: Substrate temperature, sputtering pressure and bias voltage |
Autor(es): | Castro, M. V. Tavares, C. J. |
Palavras-chave: | Thin films Transparent conducting oxide Gallium-doped zinc oxide Sputtering Electrical properties Pressure Bias voltage Substrate temperature |
Data: | 2015 |
Editora: | Elsevier |
Revista: | Thin Solid Films |
Resumo(s): | This paper reports on the effects of different sputtering deposition process parameters (substrate temperature, sputtering pressure and bias voltage) on the electrical, optical, structural and morphological properties of gallium-doped ZnO (ZnO:Ga) of ~1 μm thick. These highly transparent and conductive films were deposited on glass surfaces by d.c. pulsed magnetron sputtering from a GZO (ZnO(95.5):Ga2O3(4.5)) ceramic target in an argon atmosphere. X-ray diffraction experiments show that all films have a hexagonal wurtzite structure with the [001] preferred crystallographic direction, and themorphology of the films (obtained fromscanning electron microscope analysis) is sensitive to the process parameters. All ZnO:Ga films have an average transmittance above 80% in the visible region, and the lowest electrical resistivity of 3.03 × 10−4 Ω·cm was achieved for the sample submitted to the lowest bias voltage (−40 V), which corresponds to a carrier concentration and a carrier mobility of 6.99 × 1020 cm−3 and 29.49 cm2 V−1 s−1, respectively. A high substrate temperature, high sputtering pressure and lownegative bias voltage (within the range of studied parameters) proved to be very promising on obtaining optimized ZnO:Ga films, ensuring suitable properties for application as transparent electrodes in photovoltaic cells. |
Tipo: | Artigo |
URI: | https://hdl.handle.net/1822/36973 |
DOI: | 10.1016/j.tsf.2015.04.036 |
ISSN: | 0040-6090 |
Arbitragem científica: | yes |
Acesso: | Acesso aberto |
Aparece nas coleções: | CDF - GRF - Artigos/Papers (with refereeing) |
Ficheiros deste registo:
Ficheiro | Descrição | Tamanho | Formato | |
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2015-GZO-CT.pdf | 1,96 MB | Adobe PDF | Ver/Abrir |