Utilize este identificador para referenciar este registo:
https://hdl.handle.net/1822/14191
Título: | Structural characterization of μc-Si:H films produced by R.F. magnetron sputtering |
Autor(es): | Cerqueira, M. F. Ferreira, J. A. Andritschky, M. Costa, Manuel F. M. |
Palavras-chave: | Microcrystalline-silicon Raman X-ray TEM |
Data: | 1998 |
Editora: | Elsevier |
Revista: | Microelectronics Engineering |
Resumo(s): | Microcrystalline silicon thin films were produced by R.F. magnetron sputtering. The microstructure of these films has been studied by X-ray diffraction, transmission electron microscopy (TEM) and Raman spectroscopy. Average values of crystalline size and strain obtained by the different tecnhiques used are critically compared and the reasons for the differences are discussed. |
Tipo: | Artigo |
URI: | https://hdl.handle.net/1822/14191 |
DOI: | 10.1016/S0167-9317(98)00236-6 |
ISSN: | 0167-9317 |
Versão da editora: | http://dl.acm.org/citation.cfm?id=298445 |
Arbitragem científica: | yes |
Acesso: | Acesso aberto |
Aparece nas coleções: | CDF - FMNC - Artigos/Papers (with refereeing) |
Ficheiros deste registo:
Ficheiro | Descrição | Tamanho | Formato | |
---|---|---|---|---|
Strut-Si-ME1998.pdf | Documento principal | 1,64 MB | Adobe PDF | Ver/Abrir |