Utilize este identificador para referenciar este registo:
https://hdl.handle.net/1822/6993
Título: | Capacitively coupled radio-frequency hydrogen discharges: the role of kinetics |
Autor(es): | Marques, L. Jolly, Jacques Alves, L. L. |
Data: | Set-2007 |
Editora: | AIP Publishing |
Revista: | Journal of Applied Physics |
Citação: | Marques, L., Jolly, J., & Alves, L. L. (2007, September 15). Capacitively coupled radio-frequency hydrogen discharges: The role of kinetics. Journal of Applied Physics. AIP Publishing. http://doi.org/10.1063/1.2779268 |
Resumo(s): | This paper presents a systematic characterization of capacitively coupled radio-frequency hydrogen, discharges, produced within a parallel plate cylindrical setup at different rf applied voltages (Vrf=50–600 V), frequencies (f =13.56–40.68 MHz), and pressures (p=0.2–1 torr). A two-dimensional, time-dependent fluid model for charged particle transport is self-consistently solved coupled to a homogeneous kinetic model for hydrogen, including vibrationally excited molecular species and electronically excited atomic species. Numerical simulations are compared with experimental measurements of various plasma parameters. A good quantitative agreement is found between simulations and experiment for the coupled electrical power and the plasma potential. The model underestimates the values of the electron density, the self-bias potential, and the H(n=1) atom density with respect to measurements, but agrees with experiment when predicting that all these parameters increase with either Vrf, f, or p. The dissociation degree is about 10^−3 for the work conditions considered. Simulations adopt a wall recombination probability for H atoms that was experimentally measured, thus accounting for surface modification with discharge operating conditions. Results show the key role played by the atomic wall recombination mechanism in plasma description. |
Tipo: | Artigo |
URI: | https://hdl.handle.net/1822/6993 |
DOI: | 10.1063/1.2779268 |
ISSN: | 0021-8979 |
Versão da editora: | https://aip.scitation.org/doi/10.1063/1.2779268 |
Arbitragem científica: | yes |
Acesso: | Acesso aberto |
Aparece nas coleções: | CDF - FCT - Artigos/Papers (with refereeing) |
Ficheiros deste registo:
Ficheiro | Descrição | Tamanho | Formato | |
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L7-JAP07.pdf | JAP102 | 351,94 kB | Adobe PDF | Ver/Abrir |