Utilize este identificador para referenciar este registo:
https://hdl.handle.net/1822/68889
Título: | N2-H2 capacitively coupled radio-frequency discharges at low pressure: II. Modeling results: The relevance of plasma-surface interaction |
Autor(es): | Jiménez-Redondo, Miguel Chatain, Audrey Guaitella, Olivier Cernogora, Guy Carrasco, Nathalie Alves, Luis Lemos Marques, L. |
Palavras-chave: | Ccp discharge Cold plasma Modeling N2 h2 mixture Plasma surface interactions |
Data: | 2020 |
Editora: | IOP Publishing |
Revista: | Plasma Sources Science & Technology |
Resumo(s): | In this work, we present the results of simulations carried out for N2-H2 capacitively coupled radio-frequency discharges, running at low pressure (0.3-0.9 mbar), low power (5-20 W), and for amounts of H2 up to 5%. Simulations are performed using a hybrid code that couples a two-dimensional time-dependent fluid module, describing the dynamics of the charged particles in the discharge, to a zero-dimensional kinetic module, that solves the Boltzmann equation and describes the production and destruction of neutral species. The model accounts for the production of several vibrationally and electronic excited states, and contains a detailed surface chemistry that includes recombination processes and the production of NH x molecules. The results obtained highlight the relevance of the interactions between plasma and surface, given the role of the secondary electron emission in the electrical parameters of the discharge and the critical importance of the surface production of ammonia to the neutral and ionic chemistry of the discharge. |
Tipo: | Artigo |
URI: | https://hdl.handle.net/1822/68889 |
DOI: | 10.1088/1361-6595/ab9b1b |
ISSN: | 0963-0252 |
Versão da editora: | https://iopscience.iop.org/article/10.1088/1361-6595/ab9b1b |
Arbitragem científica: | yes |
Acesso: | Acesso aberto |
Aparece nas coleções: | CDF - FCT - Artigos/Papers (with refereeing) |
Ficheiros deste registo:
Ficheiro | Descrição | Tamanho | Formato | |
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20-1-27 N2-H2_pt2_model.pdf | 4,95 MB | Adobe PDF | Ver/Abrir |