Please use this identifier to cite or link to this item: http://hdl.handle.net/1822/60289

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dc.contributor.authorMoreira, Eurico Estevespor
dc.contributor.authorGaspar, Joãopor
dc.contributor.authorRocha, Luís Alexandre Machadopor
dc.date.accessioned2019-05-09T14:55:31Z-
dc.date.available2019-05-09T14:55:31Z-
dc.date.issued2018-11-09-
dc.identifier.issn2504-3900-
dc.identifier.urihttp://hdl.handle.net/1822/60289-
dc.description.abstractA Lorentz force MEMS magnetometer based on a double-ended tuning fork (DETF) for out-of-plane sensing is presented here. A novel configuration using a hexagonal-shaped Lorentz force transducer is used, which simplifies the sensor configuration and improves its sensitivity. Frequency modulated devices were fabricated in an in-house process on silicon on insulator wafers (SOI) and then tested in vacuum. The final devices have a differential configuration and experimental characterization shows a sensitivity of 4.59 Hz/mT for a total input current (on the Lorentz bar) of 1.5 mA.por
dc.description.sponsorshipThe first author is supported by FCT—Fundação para a Ciência e Tecnologia through the grant PDE/BDE/114564/2016. This work is supported by FCT with the reference project UID/EEA/04436/2013, COMPETE 2020 with the code POCI-01-0145-FEDER-006941.por
dc.language.isoengpor
dc.publisherMultidisciplinary Digital Publishing Institutepor
dc.relationPDE/BDE/114564/2016por
dc.relationinfo:eu-repo/grantAgreement/FCT/5876/147325/PTpor
dc.rightsopenAccesspor
dc.rights.urihttp://creativecommons.org/licenses/by/4.0/por
dc.titleFrequency modulated magnetometer using a double-ended tuning fork resonatorpor
dc.typeconferencePaperpor
dc.peerreviewedyespor
dc.date.updated2019-04-11T11:06:39Z-
dc.identifier.doi10.3390/proceedings2131028por
dc.description.publicationversioninfo:eu-repo/semantics/publishedVersionpor
sdum.journalProceedingspor
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