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TitleFrequency modulated magnetometer using a double-ended tuning fork resonator
Author(s)Moreira, Eurico Esteves
Gaspar, João
Rocha, Luís Alexandre Machado
Issue date9-Nov-2018
PublisherMultidisciplinary Digital Publishing Institute
Abstract(s)A Lorentz force MEMS magnetometer based on a double-ended tuning fork (DETF) for out-of-plane sensing is presented here. A novel configuration using a hexagonal-shaped Lorentz force transducer is used, which simplifies the sensor configuration and improves its sensitivity. Frequency modulated devices were fabricated in an in-house process on silicon on insulator wafers (SOI) and then tested in vacuum. The final devices have a differential configuration and experimental characterization shows a sensitivity of 4.59 Hz/mT for a total input current (on the Lorentz bar) of 1.5 mA.
TypeConference paper
AccessOpen access
Appears in Collections:BUM - MDPI

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