Please use this identifier to cite or link to this item: http://hdl.handle.net/1822/5763

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dc.contributor.authorMoura, C.-
dc.contributor.authorCarvalho, P.-
dc.contributor.authorVaz, F.-
dc.contributor.authorCunha, L.-
dc.contributor.authorAlves, E.-
dc.date.accessioned2006-11-08T16:22:01Z-
dc.date.available2006-11-08T16:22:01Z-
dc.date.issued2006-
dc.identifier.citation"Thin solid films". ISSN 0040-6090. 515:3 (2006) 1132-1137.eng
dc.identifier.issn0040-6090eng
dc.identifier.urihttp://hdl.handle.net/1822/5763-
dc.description.abstractRaman spectroscopy has been used as a local probe to characterize the structural evolution of magnetron-sputtered decorative zirconium oxynitride ZrOxNy films which result from an increase of reactive gas flow in the deposition The lines shapes, the frequency position and widths of the Raman bands show a systematic change as a function of the reactive gas flow (a mixture of both oxygen and nitrogen). The as-deposited zirconium nitride film presents a Raman spectrum with the typical broadened bands, due to the disorder induced by N vacancies. The recorded Raman spectrum of the zirconium oxide film is typical of the monoclinic phase of ZrO2, which is shown also by X-ray diffraction. Raman spectra of zirconium oxynitride thin films present changes, which are found to be closely related with the oxygen content in films and the subsequent structural changes.eng
dc.description.sponsorshipFCT institution by the project nº POCTI/CTM/38086/2001 co-financed by European community fund FEDERpor
dc.description.sponsorshipEuropean Union through the NMP3-CT-2003 505948 project "HARDECOAT"por
dc.language.isoengeng
dc.publisherElseviereng
dc.relationinfo:eu-repo/grantAgreement/FCT/POCI/38086/PT-
dc.rightsopenAccesseng
dc.subjectSputteringeng
dc.subjectZirconium oxynitrideeng
dc.subjectRamaneng
dc.subjectX-ray diffractioneng
dc.subjectDecorative coatingseng
dc.titleRaman spectra and structural analysis in ZrOxNy thin filmseng
dc.typearticlepor
dc.peerreviewedyeseng
dc.relation.publisherversionwww.elsevier.comeng
sdum.number3eng
sdum.pagination1132-1137eng
sdum.publicationstatuspublishedeng
sdum.volume515eng
oaire.citationStartPage1132por
oaire.citationEndPage1137por
oaire.citationIssue3por
oaire.citationVolume515por
dc.identifier.doi10.1016/j.tsf.2006.07.039por
dc.subject.wosScience & Technologypor
sdum.journalThin solid filmspor
Appears in Collections:CDF - FMNC - Artigos/Papers (with refereeing)
CDF - GRF - Artigos/Papers (with refereeing)

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