Please use this identifier to cite or link to this item: http://hdl.handle.net/1822/55126

TitleInvestigations on magnetron sputtered tantalum oxynitride thin films
Author(s)Cristea, D.
Cunha, L.
Patru, M.
Munteanu, D.
KeywordsTantalum oxynitride
Thin film
Sputtering
Microstructure
Issue date2015
CitationD. Cristea, L. Cunha, M. Pătru, D. Munteanu, Investigations on magnetron sputtered tantalum oxynitride thin films. Materials Science. Non-Equilibrium Phase Transformations, issue 2/2015 (2015) 30-33
Abstract(s)Tantalum oxynitride thin solid films have been deposited by reactive magnetron sputtering, using a fixed proportion reactive gas mixture (85% N2 + 15% O2) but with varying partial pressures, onto silicon (100) wafer substrates. The physical integrity was observed after vacuum thermal annealing at temperatures from 100 °C to 800 °C. The structural evolution on the as deposited and annealed samples was obtained by X-ray Diffraction. For the lowest partial pressure, the crystalline structure is that of tetragonal β-Ta. Increasing the reactive gas partial pressure leads to the formation of fcc-Ta(O,N) crystals, with various orientations (111, 200, 220).The higher partial pressure films are amorphous. The thermal annealing induces a phase transformation, from tetragonal β-Ta to hexagonal TaNx (x<1). AFM measurements resulted in low RMS roughness values, regardless of the partial pressure or the annealing temperature.
TypeconferencePaper
URIhttp://hdl.handle.net/1822/55126
ISSN1310-3946
Publisher versionhttp://mtmcongress.com/proceedngs/2015/2/09.INVESTIGATIONS%20ON%20MAGNETRON%20SPUTTERED%20TANTALUM%20OXYNITRIDE%20THIN%20FILMS.pdf
Peer-Reviewedyes
AccessrestrictedAccess
Appears in Collections:CDF - GRF - Outros Documentos/Other Documents (without refereeing)

Files in This Item:
File Description SizeFormat 
24_CRISTEA_mtm15.pdf1,2 MBAdobe PDFView/Open    Request a copy!

Partilhe no FacebookPartilhe no TwitterPartilhe no DeliciousPartilhe no LinkedInPartilhe no DiggAdicionar ao Google BookmarksPartilhe no MySpacePartilhe no Orkut
Exporte no formato BibTex mendeley Exporte no formato Endnote Adicione ao seu Currículo DeGóis