Please use this identifier to cite or link to this item: http://hdl.handle.net/1822/50711

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dc.contributor.authorMoreira, Eurico Estevespor
dc.contributor.authorLima, Vasco António Lourençopor
dc.contributor.authorAlves, Filipe Manuel Serrapor
dc.contributor.authorCabral, Jorgepor
dc.contributor.authorGaspar, Joãopor
dc.contributor.authorRocha, Luís Alexandre Machadopor
dc.date.accessioned2018-02-20T15:13:19Z-
dc.date.issued2016-06-
dc.identifier.issn0924-4247por
dc.identifier.urihttp://hdl.handle.net/1822/50711-
dc.description.abstractBi-directional full-gap tracking on parallel-plate electrostatic actuators using closed-loop control is demonstrated in this paper. On-Off control is explored, where the actuator position is controlled by actuating or releasing the actuator based on the actual position (weather it is above or below the desired position). Noise and delays introduced by the readout circuit compromise the performance of this control law working at 5 MHz sampling frequency. A Proportional-Integral-Derivative control law with feedback linearization is also implemented. This second control law is more complex than the on-off control and requires extensive data processing. In addition, in order to effectively control the actuator, the structure characteristics need to be available as well as the response of the readout circuit (voltage/distance converter). In order to decrease the steady-state error and the overshoot of the structure position, various proportional-integral-derivative (PID) gains are tested. Both controllers are implemented using a FPGA (Field-programmable gate array), which increases the performance of the controller. The experimental results, for both the controllers, show bi-directional tracking of several wave forms at frequencies up to 1 kHz (limited by the dynamics of the actuators). The extension of the travel range is about 88.9% of the full-gap available (due to the mechanical stoppers present in the structure). This corresponds to a displacement range extension of 267%.por
dc.language.isoengpor
dc.publisherElsevierpor
dc.rightsrestrictedAccesspor
dc.subjectElectrostatic micro-actuatorspor
dc.subjectControl systempor
dc.subjectPID controlpor
dc.subjectFeedback linearizationpor
dc.subjectFPGApor
dc.subjectMEMSpor
dc.subjectTrackingpor
dc.titleFull-gap tracking system for parallel plate electrostatic actuators using closed-loop controlpor
dc.typearticle-
dc.peerreviewedyespor
oaire.citationStartPage174por
oaire.citationEndPage183por
oaire.citationVolume244por
dc.date.updated2018-02-08T09:15:26Z-
dc.identifier.doi10.1016/j.sna.2016.04.002por
dc.description.publicationversioninfo:eu-repo/semantics/publishedVersionpor
dc.subject.wosScience & Technology-
sdum.export.identifier2607-
sdum.journalSensors and Actuators A: Physicalpor
Appears in Collections:DEI - Artigos em revistas internacionais

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