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TitleBi-directional extended range parallel plate electrostatic actuator based on feedback linearization
Author(s)Moreira, Eurico Esteves
Alves, Filipe Manuel Serra
Dias, R. A.
Costa, M.
Fonseca, H.
Cabral, Jorge
Gaspar, J.
Rocha, Luís Alexandre Machado
Issue dateJan-2015
JournalProceedings Ieee Micro Electro Mechanical Systems
Abstract(s)In this paper, we present a bi-directional extended range parallel-plate electrostatic actuator using feedback linearization control. The actuator can have stable displacements up to 90% of the full-gap (limited by mechanical stoppers) on both directions, i.e., the device can move +/- 2 mu m within a +/- 2.25 mu m gap. The system has successfully tracked references until 1kHz (limited by the dynamics of the device) and it presents a capacitor tuning range of 17, using an actuation voltage from 0 to 10V. The results presented here are a clear advance in respect to the current state-of-the-art in terms of tracking capabilities, total stable displacement and tuning range.
TypeConference paper
AccessRestricted access (UMinho)
Appears in Collections:DEI - Artigos em atas de congressos internacionais

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