Utilize este identificador para referenciar este registo:
https://hdl.handle.net/1822/50686
Título: | Embedded MEMS Platform for structure test and characterization |
Autor(es): | Brito, N. Alves, F. S. Cabral, Jorge Gaspar, J. Monteiro, João L. Rocha, Luís Alexandre Machado |
Palavras-chave: | MEMS characterization Pull-in voltage Dedicated embedded system |
Data: | 2015 |
Editora: | Elsevier |
Revista: | Procedia Engineering |
Resumo(s): | The test and characterization of each individual manufactured MEMS structure is of major importance, both from the economic and quality standpoints [1-3]. A fast, cost-wise and easy to adjust testing system is a step forward on MEMS testing and characterization automation and cost reduction. This paper presents a processor-centric hardware assisted embedded solution to test MEMS structures using the built-in electrostatic actuation mechanisms. The system is based on the Leon soft-core processor, attached with the necessary MEMS specific hardware peripherals (capacitive readout circuit, ADC and DAC) to process the structure response to controlled actuation signals in real-time. The deterministic, parallel behavior of the dedicated hardware peripherals, allied to the simplicity of the sequential programming on a processor results in a well-suited solution to the necessary computational challenges. The system enables measurement of resonant frequency (Fr), quality factor (Q) and pull-in voltage (Vpi) within 1.5 seconds with repeatability better than 5 ppt (parts per thousand). |
Tipo: | Artigo em ata de conferência |
Descrição: | "Procedia Engineering, vol. 120 (2015)" |
URI: | https://hdl.handle.net/1822/50686 |
DOI: | 10.1016/j.proeng.2015.08.567 |
ISSN: | 1877-7058 |
Arbitragem científica: | yes |
Acesso: | Acesso restrito UMinho |
Aparece nas coleções: | DEI - Artigos em atas de congressos internacionais |
Ficheiros deste registo:
Ficheiro | Descrição | Tamanho | Formato | |
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Eurosensors_NB.pdf Acesso restrito! | 1,12 MB | Adobe PDF | Ver/Abrir |